Patents by Inventor Motohiro Umezu

Motohiro Umezu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Exposure Apparatus
    Publication number: 20070207601
    Abstract: In a stage member for use in an exposure apparatus, a honeycomb structural body has walls that are extended in a direction perpendicular to a longitudinal direction of the stage member and that surround square shaped prismatic spaces, so as to accomplish a high resistance and a high resonant frequency with respect to torsional vibration. The honeycomb structural body of the stage member is preferably made of a ceramic material.
    Type: Application
    Filed: June 16, 2005
    Publication date: September 6, 2007
    Applicants: TOHOKU UNIVERSITY, NIHON CERATEC CO., LTD., TAIHEIYO CEMENT CORPORATION
    Inventors: Tadahiro Ohmi, Kiwamu Takehisa, Shirou Moriyama, Shunichi Sasaki, Masataka Hirose, Ishii Mamoru, Tomoyuki Sugaya, Masako Kataoka, Motohiro Umezu
  • Electrically conductive ceramic material, a process of producing same, and an electrostatic chuck
    Patent number: 6631062
    Abstract: An electrically conductive ceramics comprises a compound containing at least one element belonging to the Group 3A of the periodic table and TiO2−x (0<x<2) in a range such that the TiO2−x (0<x<2) accounts for 1 to 60 wt % of the total amount of the ceramics, and at least part of the compound and the TiO2−x form a composite oxide.
    Type: Grant
    Filed: December 6, 1999
    Date of Patent: October 7, 2003
    Assignees: Nihon Ceratec Co., Ltd., Taiheiyo Cement Corporation
    Inventors: Kazuyoshi Minamisawa, Hiroyuki Matsuo, Sari Endoh, Yukio Kishi, Kazunori Saitoh, Hiroshi Suzuki, Motohiro Umezu, Mamoru Ishii, Hironori Ishida, Youichi Shirakawa, Norikazu Sashida