Patents by Inventor Motoji Hirano

Motoji Hirano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20030029998
    Abstract: An electron beam length-measurement apparatus includes: an electron gun emitting the electron beam; a deflecting unit deflecting the electron beam; a detector operable to detect electrons scattered by the electron beam; a reference-substrate holding unit on which a reference substrate including a reference portion of a reference length it placed; an object holding unit on which the object can be placed; a calibration scanning controller controlling the deflecting unit; a relationship detecting unit detecting a time period of irradiation of the reference portion with the electron beam, and for detecting a relationship between a time period and length of scanning; a length-measurement scanning controller controlling the deflecting unit; and a measurement unit detecting a time period of irradiation of the predetermined portion of the object with the electron beam, and detecting a length corresponding to the detected time period of the irradiation of the object.
    Type: Application
    Filed: September 6, 2002
    Publication date: February 13, 2003
    Inventors: Jun Matsumoto, Takayuki Nakamura, Motoji Hirano