Abstract: An object is to provide a technique capable of measuring a shape of an object while maintaining accuracy even when positional accuracy of a mechanism configured to move a probe is insufficient. A measurement control device 210 controls a movement mechanism 500 to move a measurement probe 160 to a target position of a target to be measured, calculates an error between an actual position of the measurement probe 160 detected by the measurement probe 160 and the target position, corrects the error by moving the measurement probe 160 by the movement mechanism 500 based on the calculated error, and then causes the measurement probe 160 to perform a distance measurement.