Patents by Inventor Motonari Tateno

Motonari Tateno has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical inspection apparatus and optical inspection method
    Patent number: 7423745
    Abstract: An optical inspection apparatus for inspecting an inspection target surface by irradiating the inspection target surface with light, includes: a condensing and scanning optical system for condensing light from a light source on the inspection target surface in a minute spot shape and scanning the condensed minute-spot-shaped light onto the inspection target surface; and a phase change information detection apparatus for detecting optical phase change information in an area of the inspection target surface irradiated with the minute-spot-shaped light scanned by the condensing and scanning optical system.
    Type: Grant
    Filed: September 20, 2005
    Date of Patent: September 9, 2008
    Assignee: NEC Corporation
    Inventors: Hideyuki Moribe, Motonari Tateno
  • Optical inspection apparatus and optical inspection method
    Publication number: 20060066844
    Abstract: An optical inspection apparatus for inspecting an inspection target surface by irradiating the inspection target surface with light, includes: a condensing and scanning optical system for condensing light from a light source on the inspection target surface in a minute spot shape and scanning the condensed minute-spot-shaped light onto the inspection target surface; and a phase change information detection apparatus for detecting optical phase change information in an area of the inspection target surface irradiated with the minute-spot-shaped light scanned by the condensing and scanning optical system.
    Type: Application
    Filed: September 20, 2005
    Publication date: March 30, 2006
    Applicant: NEC Corporation
    Inventors: Hideyuki Moribe, Motonari Tateno
  • Optical reticle substrate inspection apparatus and beam scanning method of the same
    Patent number: 6665112
    Abstract: An optical reticle substrate inspection apparatus is provided with a laser, a first acoustooptical element which scans a laser beam output from the laser, an a second acoustooptical element which generates a virtual image with a concave lens effect to the laser beam output from the first acoustooptical element. The optical reticle substrate inspection apparatus is further provided with a concave lens arranged on the output side of the laser beam of the second acoustooptical element and an optical system which images the virtual image on a reticle substrate being an object to be inspected. The concave lens magnifies the laser beam in a perpendicular direction to the scanning direction by the first acoustooptical element.
    Type: Grant
    Filed: February 4, 2003
    Date of Patent: December 16, 2003
    Assignee: NEC Corporation
    Inventor: Motonari Tateno
  • Optical reticle substrate inspection apparatus and beam scanning method of the same
    Publication number: 20030117683
    Abstract: An optical reticle substrate inspection apparatus is provided with a laser, a first acoustooptical element which scans a laser beam output form the laser, and a second acoustooptical element which generates a virtual image with a concave lens effect to the laser beam output from the first acoustooptical element. The optical reticle substrate inspection apparatus is further provided with a concave lens arranged on the output side of the laser beam of the second acoustooptical element and an optical system which images the virtual image on a reticle substrate being an object to be inspected. The concave lens magnifies the laser beam in a perpendicular direction to the scanning direction by the first acoustooptical element.
    Type: Application
    Filed: February 4, 2003
    Publication date: June 26, 2003
    Applicant: NEC Corporation
    Inventor: Motonari Tateno
  • Optical reticle substrate inspection apparatus and beam scanning method of the same
    Patent number: 6538795
    Abstract: An optical reticle substrate inspection apparatus is provided with a laser, a first acoustooptical element which scans a laser beam output from the laser, and a second acoustooptical element which generates a virtual image with a concave lens effect to the laser beam output from the first acoustooptical element. The optical reticle substrate inspection apparatus is further provided with a concave lens arranged on the output side of the laser beam of the second acoustooptical element and an optical system which images the virtual image on a reticle substrate being an object to be inspected. The concave lens magnifies the laser beam in a perpendicular direction to the scanning direction by the first acoustooptical element.
    Type: Grant
    Filed: November 29, 2001
    Date of Patent: March 25, 2003
    Assignee: NEC Corporation
    Inventor: Motonari Tateno
  • Optical reticle substrate inspection apparatus and beam scanning method of the same
    Publication number: 20020093719
    Abstract: An optical reticle substrate inspection apparatus is provided with a laser, a first acoustooptical element which scans a laser beam output form the laser, and a second acoustooptical element which generates a virtual image with a concave lens effect to the laser beam output from the first acoustooptical element. The optical reticle substrate inspection apparatus is further provided with a concave lens arranged on the output side of the laser beam of the second acoustooptical element and an optical system which images the virtual image on a reticle substrate being an object to be inspected. The concave lens magnifies the laser beam in a perpendicular direction to the scanning direction by the first acoustooptical element.
    Type: Application
    Filed: November 29, 2001
    Publication date: July 18, 2002
    Applicant: NEC Corporation
    Inventor: Motonari Tateno