Abstract: A novel measuring method which allows measurement of fine particles which are extremely fine and contained in a very small amount in ultrapure water is provided. The number frequency with respect to the fine particles having a particle diameter of 0.1 ?m or more is measured based on the finding that the fine particles contained in the ultrapure water at the use point of an ultrapure water production system exhibits a logarithmic normal distribution to determine the logarithmic normal distribution of the fine particles contained in the ultrapure water, and the number of the fine particles having a particle diameter of less than those of the measured particles contained in the ultrapure water is obtained from the distribution.

Abstract: A novel measuring method which allows measurement of fine particles which are extremely fine and contained in a very small amount in ultrapure water is provided. The number frequency with respect to the fine particles having a particle diameter of 0.1 ?m or more is measured based on the finding that the fine particles contained in the ultrapure water at the use point of an ultrapure water production system exhibits a logarithmic normal distribution to determine the logarithmic normal distribution of the fine particles contained in the ultrapure water, and the number of the fine particles having a particle diameter of less than those of the measured particles contained in the ultrapure water is obtained from the distribution.

Abstract: A method for producing pure water is provided which reduces non-ionic silica in pure or ultrapure water. With the method, non-ionic silica which is contained in water is brought into contact with ozone having a concentration of at least 1 ppm for at least 20 minutes to react therewith and, simultaneously with or after this reaction process, irradiated with ultraviolet rays to undergo ionization and passed through an anion exchange column. The processed water passed through this ion exchange resin column contains practically no non-ionic silica.

Abstract: An apparatus for producing pure water is provided which includes means for ionizing non-ionic silica which is contained in water comprising a vessel for allowing the water to pass therethrough and stay therein for predetermined lengths of time; means for dissolving ozone in the water in this vessel; means for irradiating the water in which ozone has been dissolved with ultraviolet rays; means for separating gases from liquids located between the means for dissolving ozone and the means for irradiating water; and means for fixing ionized silica in the water to a solid electrolyte by ion exchange.

Abstract: In an aeration apparatus and method for producing ultrapure water, a device for vigorously mixing an aeration gas with untreated water is attached to a water pipe through which the water is fed to a reaction tank. The device vigorously mixes the aeration gas with the untreated water in the water pipe before the water reaches the reaction tank. The reaction tank can be smaller, an aeration system for producing ultrapure water can be simpler, and the efficiency of the aeration system can be improved.

Abstract: The present invention provides a wet-processing apparatus comprising a chamber having a working space, means for wet processing in the working space, means for supplying nitrogen gas in fluid communication with the chamber, a nitrogen gas outlet located in a wall of the chamber, means for cleaning nitrogen gas by removing contaminants mixed therewith located in an area of the chamber downstream of the working space and upstream of the nitrogen gas outlet and having a contaminated gas inlet and a treated gas outlet in fluid communication with the chamber, means for diverting gas in the chamber located downstream of the treated gas outlet and upstream of the nitrogen gas supplying means, the means for diverting gas having a first position providing egress of treated gas from the chamber through the nitrogen gas outlet while inhibiting fluid communication to other parts of the chamber and a second position permitting fluid communication and recirculation of the treated gas to other parts of the chamber while pre

Abstract: In an apparatus and method for purifying water, an oxidation forcibly turns colloidal substances into fine particles of oxides, thus increasing the size of the particles. The effluent of oxidation process is treated by ion exchange process, and then treated by membrane process. Because of the increased size of the particles, they are easily removed in the subsequent ion exchange process. The membrane process is thereby prevented from clogging up, and then removes fine particles that cannot be removed by the ion exchange process. Colloidal substances are thus removed effectively from raw water.

Abstract: An apparatus for treating an organic waste gas has an oxidizing means for contacting the waste gas with an oxidizing agent to effect primary oxidation and form a primary oxidation product. An ultraviolet wave generator inadiates the primary reaction product with UV light in the near UV range to effect secondary oxidation of the primary reaction product.

Abstract: A carrier cleaning and drying apparatus for cleaning and drying a wafer processing carrier has a cleaning tank for accommodating the carrier and a high-pressure injection nozzle disposed in an upper portion of the cleaning tank and for injecting a pressurized cleaning solution. This high-pressure injection nozzle is moved within a plane and the cleaning solution is injected at high pressure therefrom, thereby removing dust adhering to the inner and outer surfaces of the carrier by means of the force of injection. A supporting and rotating mechanism portion is also provided which, during cleaning of the carrier, swings the carrier at a predetermined angle, and, after cleaning, effects drying by spinning the carrier at high speed.

Abstract: An apparatus for counting particles attached to surfaces of a solid is disclosed which includes an external tank, an internal tank disposed within the external tank for hermetically accommodating a measuring liquid into which a sample having particles attached to the surfaces thereof is to be immersed, a driving mechanism for rotating the internal tank with respect to the external tank, sonic wave generators provided on the external tank for generating sonic waves having a plurality of different frequencies toward the internal tank, and a measuring mechanism connectable to the internal tank in a hermetic fashion for counting the number of particles in the measuring liquid removed from the sample by the sonic waves generated from the sonic wave generators.

Abstract: A device for measuring the absolute value of the density of salts in atmosphere, which comprises: an airtight water tank containing super pure water of a predetermined quantity; a means for bubbling a predetermined quantity of air in atmosphere for a predetermined time into the super pure water to make the salts in the air dissolve in the water; a means for exhausting the super pure water after the bubbling; and a sodium ion analyzer for measuring the density of sodium ions in the exhausted super pure water of a predetermined quantity.