Patents by Inventor Mouna Salhi

Mouna Salhi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of producing a suspended membrane device
    Patent number: 8163586
    Abstract: A method for producing a device with at least one suspended membrane, including the following steps: Producing a trench through a first sacrificial layer and a second layer deposited on the first sacrificial layer, the trench completely surrounding at least a portion of the first sacrificial layer and at least a portion of the second layer, filling all or a portion of the trench with at least one material capable of resisting at least one etching agent, and etching the portion of the first sacrificial layer with the etching agent through at least one opening made in the second layer, the portion of the second layer forming at least one portion of the suspended membrane.
    Type: Grant
    Filed: November 5, 2008
    Date of Patent: April 24, 2012
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Patrice Rey, Mouna Salhi
  • METHOD OF PRODUCING A SUSPENDED MEMBRANE DEVICE
    Publication number: 20090124035
    Abstract: A method for producing a device with at least one suspended membrane, comprising at least the following steps: producing a trench through a first sacrificial layer and a second layer deposited on the first sacrificial layer, the trench completely surrounding at least a portion of the first sacrificial layer and at least a portion of the second layer, filling all or a portion of the trench with at least one material capable of resisting at least one etching agent, etching said portion of the first sacrificial layer with said etching agent through at least one opening made in the second layer, said portion of the second layer forming at least one portion of the suspended membrane.
    Type: Application
    Filed: November 5, 2008
    Publication date: May 14, 2009
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE
    Inventors: Patrice Rey, Mouna Salhi