Patents by Inventor Moutasim KHOGLY

Moutasim KHOGLY has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reduction of Charging Induced Damage in Photolithography Wet Process
    Publication number: 20150155162
    Abstract: An approach is developed to use an acidic rinse to reduce charge during the lithographic process, and thereby eliminate the crystalline damage and associated yield loss associated with the accumulated charge. The crystalline damage has been found to occur for certain thicknesses of dielectric layers, and such damage is irreparable. A sparge can be used to dissolve carbon dioxide in water to provide a weak acidic rinse.
    Type: Application
    Filed: December 3, 2013
    Publication date: June 4, 2015
    Applicant: Spansion LLC
    Inventors: Daniel E. SUTTON, Christopher M. FOSTER, Kelley Kyle HIGGINS, SR., Moutasim KHOGLY, Alexander J. BIERWAG, Daniel H. WILCOX