Abstract: A panel transfer device according to one or more embodiment may include a base; an arm rotatably connected to the base, which includes a first detector; an end effector connected to the arm, including: a connector rotatably connected to the arm; a wrist connected to the connector, including a second detector; and a pair of forks connected to the wrist, including sensor. In response to the end effector gripping the panel, the sensor detects displacement of the panel in a first direction, the end effector rotates to a position where the first and second detectors face each other, the first and second detectors communicate to detect displacement of the panel in a second direction, and the panel transfer device calculates a correction amount based on the detected displacement of the panel in the first direction and in the second direction, and places the panel based on the correction amount.

Abstract: A substrate handling apparatus according to one or more embodiments may include: a base, an elevating unit that is connected to the base to freely elevate and lower, an arm that is rotatably connected to the elevating unit, a disk that is provided on the arm, and a hand that is rotatably connected to the arm, wherein in case that the hand is provided on a position to overlap the arm, the disk is provided under the substrate extracted by the hand.

Abstract: A substrate handling apparatus according to one or more embodiments may include: a base, an elevating unit that is connected to the base to freely elevate and lower, an arm that is rotatably connected to the elevating unit, a disk that is provided on the arm, and a hand that is rotatably connected to the arm, wherein in case that the hand is provided on a position to overlap the arm, the disk is provided under the substrate extracted by the hand.