Patents by Inventor Mu-Lung CHE

Mu-Lung CHE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer-level inspection using on-valve inspection detectors
    Patent number: 10957566
    Abstract: A system and method for wafer-level inspection using on-valve inspection detectors to detect defects on a semiconductor wafer surfaces during a semiconductor device manufacturing process is disclosed herein. In some exemplary embodiments, a method for wafer-level inspection includes: transporting a semiconductor wafer through a transfer port of a processing chamber; scanning a surface of the semiconductor wafer automatically using at least one on-valve inspection detector arranged on a vacuum valve providing access through the transfer port; generating at least one surface image of the surface of the semiconductor wafer; and analyzing the at least one surface image to detect defects on the surface of the semiconductor wafer.
    Type: Grant
    Filed: April 12, 2018
    Date of Patent: March 23, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Mu-Lung Che, Fu Chiang Hsu
  • WAFER-LEVEL INSPECTION USING ON-VALVE INSPECTION DETECTORS
    Publication number: 20190318948
    Abstract: A system and method for wafer-level inspection using on-valve inspection detectors to detect defects on a semiconductor wafer surfaces during a semiconductor device manufacturing process is disclosed herein. In some exemplary embodiments, a method for wafer-level inspection includes: transporting a semiconductor wafer through a transfer port of a processing chamber; scanning a surface of the semiconductor wafer automatically using at least one on-valve inspection detector arranged on a vacuum valve providing access through the transfer port; generating at least one surface image of the surface of the semiconductor wafer; and analyzing the at least one surface image to detect defects on the surface of the semiconductor wafer.
    Type: Application
    Filed: April 12, 2018
    Publication date: October 17, 2019
    Inventors: Mu-Lung CHE, Chen-Feng HSU