Patents by Inventor Mu Yer LEE

Mu Yer LEE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chuck stage particle detection device
    Patent number: 10825703
    Abstract: A particle detection device includes a chuck stage on which a wafer is configured to be seated, first and second adsorption holes shaped as closed concentric curves passing through the chuck stage, a first adsorption module connected to the first adsorption hole under the chuck stage and configured to provide a vacuum pressure, a second adsorption module connected to the second adsorption hole under the chuck stage and configured to provide a vacuum pressure, a pressure gauge configured to measure vacuum pressures of the first and second adsorption holes and a detection module configured to receive the vacuum pressures of the first and second adsorption holes from the pressure gauge and detect whether the wafer is fixed or not and whether particle is present or not, based on the received vacuum pressures. The first and second adsorption modules sequentially provide the vacuum pressure to the first and second adsorption holes.
    Type: Grant
    Filed: January 10, 2018
    Date of Patent: November 3, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Mu Yer Lee, Hyo Bum Kang, Jun Sung Lee, Jae Lyang Jung, Young Min Hur
  • CHUCK STAGE PARTICLE DETECTION DEVICE
    Publication number: 20180323094
    Abstract: A particle detection device includes a chuck stage on which a wafer is configured to be seated, first and second adsorption holes shaped as closed concentric curves passing through the chuck stage, a first adsorption module connected to the first adsorption hole under the chuck stage and configured to provide a vacuum pressure, a second adsorption module connected to the second adsorption hole under the chuck stage and configured to provide a vacuum pressure, a pressure gauge configured to measure vacuum pressures of the first and second adsorption holes and a detection module configured to receive the vacuum pressures of the first and second adsorption holes from the pressure gauge and detect whether the wafer is fixed or not and whether particle is present or not, based on the received vacuum pressures. The first and second adsorption modules sequentially provide the vacuum pressure to the first and second adsorption holes.
    Type: Application
    Filed: January 10, 2018
    Publication date: November 8, 2018
    Inventors: MU YER LEE, Hyo Bum Kang, Jun Sung Lee, Jae Lyang Jung, Young Min Hur
  • Board coolant jacket jig system and method of separating board coolant jacket
    Patent number: 8681497
    Abstract: A board coolant jacket jig system includes a main frame that includes a board installation stand on which a board is installed, and a coolant jacket separation unit that is coupled to the main frame and selectively coupled to the coolant jacket coupled to the board, to separate the coolant jacket.
    Type: Grant
    Filed: September 23, 2011
    Date of Patent: March 25, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Mu Yer Lee
  • BOARD COOLANT JACKET JIG SYSTEM AND METHOD OF SEPARATING BOARD COOLANT JACKET
    Publication number: 20120138264
    Abstract: A board coolant jacket jig system includes a main frame that includes a board installation stand on which a board is installed, and a coolant jacket separation unit that is coupled to the main frame and selectively coupled to the coolant jacket coupled to the board, to separate the coolant jacket.
    Type: Application
    Filed: September 23, 2011
    Publication date: June 7, 2012
    Applicant: Samsung Electronics Co., Ltd
    Inventor: Mu Yer LEE