Patents by Inventor Mukesh Dhami SINGH

Mukesh Dhami SINGH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • TUNABLE AND NON-TUNABLE HEAT SHIELDS TO AFFECT TEMPERATURE DISTRIBUTION PROFILES OF SUBSTRATE SUPPORTS
    Publication number: 20220333239
    Abstract: A heat shield for a platen of a substrate support includes a body and absorption-reflection-transmission regions. The absorption-reflection-transmission regions are in contact with the body and are configured to at least one of affect or modulate at least a portion of a heat flux pattern between a distal reference surface and the platen. The absorption-reflection-transmission regions include tunable aspects to tune the at least a portion of the heat flux pattern.
    Type: Application
    Filed: September 24, 2020
    Publication date: October 20, 2022
    Inventors: Ashish SAURABH, Karl Frederick LEESER, Xinyi CHEN, Mukesh Dhami SINGH, Troy GOMM, Timothy Scott THOMAS, Curtis W. BAILEY