Patents by Inventor Mukherjee Maharaj

Mukherjee Maharaj has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for generating design rules for a lithographic mask design that includes long range flare effects
    Patent number: 7501212
    Abstract: A method is described for computing distance based and pattern density based design rules for the mask layout design of a VLSI chip so that the design satisfying the above design rules when manufactured on a wafer do not violate the specified tolerance on the critical dimensions (CD). The design rules are developed on the computed enclosed energy which is a convolution of the total optical energy and the pattern density of the mask. The total optical energy is the sum of the short range diffraction limited optical energy and the long range optical flare.
    Type: Grant
    Filed: January 5, 2005
    Date of Patent: March 10, 2009
    Assignee: International Business Machines Corporation
    Inventors: Kafai Lai, Chieh-Yu Lin, Nayak Jawahar, Mukherjee Maharaj
  • Method for generating design rules for a lithographic mask design that includes long range flare effects
    Publication number: 20060150131
    Abstract: A method is described for computing distance based and pattern density based design rules for the mask layout design of a VLSI chip so that the design satisfying the above design rules when manufactured on a wafer do not violate the specified tolerance on the critical dimensions (CD). The design rules are developed on the computed enclosed energy which is a convolution of the total optical energy and the pattern density of the mask. The total optical energy is the sum of the short range diffraction limited optical energy and the long range optical flare.
    Type: Application
    Filed: January 5, 2005
    Publication date: July 6, 2006
    Inventors: Kafai Lai, Chieh-Yu Lin, Nayak Jawahar, Mukherjee Maharaj