Patents by Inventor Mun-Su CHOI

Mun-Su CHOI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PELLICLE FOR EUV LITHOGRAPHY
    Publication number: 20240036461
    Abstract: The pellicle has a pellicle portion that allows transmission of EUV exposure light. The pellicle portion comprises a heat radiation layer for radiating heat generated by irradiation of EUV exposure light. The heat radiation layer comprises metal and silicon, and the metal content of the heat radiation layer is greater than the silicon content. This ensures a high transmittance of 90% or more, while improving the heat radiation performance of the pellicle portion, so that it can be applied to EUV exposure light powers of 600 W or more.
    Type: Application
    Filed: July 25, 2023
    Publication date: February 1, 2024
    Applicant: S&S TECH Co., Ltd.
    Inventors: Ju-Hee HONG, Chul-Kyun PARK, Mun-Su CHOI, Dong-Hoi KIM