Patents by Inventor Mun-Su SHIN

Mun-Su SHIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of designing patterns of semiconductor devices in consideration of pattern density
    Patent number: 9557637
    Abstract: A method of designing patterns of semiconductor devices includes forming a plurality of tiles having patterns on a wafer, measuring the patterns of the plurality of tiles, analyzing the measurements of the patterns and determining a tile having such a size that the measurements linearly vary according to a design size and pattern density, and modifying the pattern density of the determined tile.
    Type: Grant
    Filed: August 1, 2014
    Date of Patent: January 31, 2017
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Joong-Won Jeon, Ji-Youn Song, Mun-Su Shin, Seong-Yul Park, Suk-Joo Lee
  • METHOD OF DESIGNING PATTERNS OF SEMICONDUCTOR DEVICES
    Publication number: 20150143312
    Abstract: A method of designing patterns of semiconductor devices includes forming a plurality of tiles having patterns on a wafer, measuring the patterns of the plurality of tiles, analyzing the measurements of the patterns and determining a tile having such a size that the measurements linearly vary according to a design size and pattern density, and modifying the pattern density of the determined tile.
    Type: Application
    Filed: August 1, 2014
    Publication date: May 21, 2015
    Inventors: Joong-Won JEON, Ji-Youn SONG, Mun-Su SHIN, Seong-Yul PARK, Suk-Joo LEE