Patents by Inventor Munehide Saimen
Munehide Saimen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10377134Abstract: A MEMS device includes a wire that is formed of a conductive portion embedded into a recess opened in a first face of a substrate and a bump electrode that is electrically connected to the wire. A total width, in a second direction intersecting a first direction along which the wire extends on the first face, of an opening of the recess in a connection region where the wire and the bump electrode are electrically connected to each other is narrower than a width, in the second direction, of an opening of the recess in a region outside the connection region.Type: GrantFiled: June 20, 2017Date of Patent: August 13, 2019Assignee: Seiko Epson CorporationInventors: Motoki Takabe, Eiju Hirai, Munehide Saimen, Yasuyuki Matsumoto, Shuichi Tanaka, Tsuyoshi Yoda
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Patent number: 10029459Abstract: A piezoelectric device includes an actuator substrate that includes a plurality of piezoelectric element rows having a plurality of piezoelectric elements, and a wiring substrate that is disposed so as to face the actuator substrate. The piezoelectric element rows include a common electrodes common to the plurality of the piezoelectric elements. The actuator substrate includes a plurality of first common wirings connected to each of the common electrodes of the plurality of the piezoelectric element rows. The wiring substrate includes a plurality of second common wirings connected to each of the first common wirings of the plurality of piezoelectric element rows, and a plurality of auxiliary wirings buried in a groove portion formed in the wiring substrate. The auxiliary wirings are connected to each of the second common wirings, and the plurality of auxiliary wirings are not connected to each other.Type: GrantFiled: November 8, 2017Date of Patent: July 24, 2018Assignee: Seiko Epson CorporationInventors: Eiju Hirai, Motoki Takabe, Katsutomo Tsukahara, Yoichi Naganuma, Munehide Saimen
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Patent number: 9969162Abstract: A MEMS device includes a first substrate in which a first electrode layer, a dielectric layer, and a second electrode layer are stacked on a driving region in this order; and a second substrate which is disposed to face a surface on which the dielectric layer of the first substrate is stacked. The first electrode layer and the dielectric layer extend beyond the second electrode layer toward a non-driving region separated from the driving region, a first resin having elasticity is disposed in a region including an end of the second electrode layer in an extending direction of the dielectric layer, and the first substrate and the second substrate are fixed with an adhesive in a state where the elastically deformed first resin is sandwiched therebetween.Type: GrantFiled: April 20, 2017Date of Patent: May 15, 2018Assignee: Seiko Epson CorporationInventors: Munehide Saimen, Eiju Hirai, Masao Nakayama
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Patent number: 9919523Abstract: A piezoelectric device includes an actuator substrate that includes a plurality of piezoelectric element rows having a plurality of piezoelectric elements, and a wiring substrate that is disposed so as to face the actuator substrate. The piezoelectric element rows include a plurality of individual electrodes disposed for each of the piezoelectric elements, and a common electrodes common to the plurality of piezoelectric elements. The wiring substrate includes a core portion disposed on a surface on the actuator substrate side, an individual wiring portion that partially covers the core portion, a common wiring portion that partially covers the core portion, and an auxiliary wiring disposed in a groove portion disposed on a first principal surface on the side opposite to the actuator substrate or on a second principal surface on the actuator substrate side. The auxiliary wiring is electrically connected to the common wiring portion.Type: GrantFiled: March 7, 2017Date of Patent: March 20, 2018Assignee: Seiko Epson CorporationInventors: Eiju Hirai, Motoki Takabe, Katsutomo Tsukahara, Yoichi Naganuma, Munehide Saimen
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Patent number: 9914301Abstract: A piezoelectric device includes an actuator substrate that includes two rows of piezoelectric element rows piezoelectric elements, and a wiring substrate that is disposed so as to face the actuator substrate. The piezoelectric element rows include individual electrodes disposed for each of the piezoelectric elements, and a common electrode common to the piezoelectric elements. The wiring substrate includes a core portion disposed on a surface on the actuator substrate side, an individual wiring portion disposed for each of the piezoelectric element rows that partially covers the core portion, and a common wiring portion disposed for each of the piezoelectric element rows that partially covers the core portion. The two rows of piezoelectric element rows are respectively disposed so as to interpose the core portion. The individual wiring portion and the common wiring portion are respectively electrically connected to the individual electrode and the common electrode.Type: GrantFiled: March 6, 2017Date of Patent: March 13, 2018Assignee: Seiko Epson CorporationInventors: Eiju Hirai, Motoki Takabe, Katsutomo Tsukahara, Yoichi Naganuma, Munehide Saimen
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Publication number: 20180065365Abstract: A piezoelectric device includes an actuator substrate that includes a plurality of piezoelectric element rows having a plurality of piezoelectric elements, and a wiring substrate that is disposed so as to face the actuator substrate. The piezoelectric element rows include a common electrodes common to the plurality of the piezoelectric elements. The actuator substrate includes a plurality of first common wirings connected to each of the common electrodes of the plurality of the piezoelectric element rows. The wiring substrate includes a plurality of second common wirings connected to each of the first common wirings of the plurality of piezoelectric element rows, and a plurality of auxiliary wirings buried in a groove portion formed in the wiring substrate. The auxiliary wirings are connected to each of the second common wirings, and the plurality of auxiliary wirings are not connected to each other.Type: ApplicationFiled: November 8, 2017Publication date: March 8, 2018Inventors: Eiju HIRAI, Motoki TAKABE, Katsutomo TSUKAHARA, Yoichi NAGANUMA, Munehide SAIMEN
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Patent number: 9908331Abstract: A MEMS device includes a plurality of movable regions, wiring lines extending along a first direction from the movable regions, and electrodes connected to the wiring lines. The electrodes include connection regions for connecting other electrode terminals to the connection regions. A plurality of the connection regions are disposed along a second direction intersecting the first direction. A distance between centers of connection regions that are adjacent in the second direction is longer than a distance between centers of movable regions that are adjacent in the second direction.Type: GrantFiled: January 30, 2017Date of Patent: March 6, 2018Assignee: Seiko Epson CorporationInventors: Eiju Hirai, Motoki Takabe, Katsutomo Tsukahara, Yoichi Naganuma, Munehide Saimen
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Publication number: 20170368826Abstract: A MEMS device includes a wire that is formed of a conductive portion embedded into a recess opened in a first face of a substrate and a bump electrode that is electrically connected to the wire. A total width, in a second direction intersecting a first direction along which the wire extends on the first face, of an opening of the recess in a connection region where the wire and the bump electrode are electrically connected to each other is narrower than a width, in the second direction, of an opening of the recess in a region outside the connection region.Type: ApplicationFiled: June 20, 2017Publication date: December 28, 2017Inventors: Motoki TAKABE, Eiju HIRAI, Munehide SAIMEN, Yasuyuki MATSUMOTO, Shuichi TANAKA, Tsuyoshi YODA
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Patent number: 9844939Abstract: A piezoelectric device includes an actuator substrate that includes a plurality of piezoelectric element rows having a plurality of piezoelectric elements, and a wiring substrate that is disposed so as to face the actuator substrate. The piezoelectric element rows include a common electrodes common to the plurality of the piezoelectric elements. The actuator substrate includes a plurality of first common wirings connected to each of the common electrodes of the plurality of the piezoelectric element rows. The wiring substrate includes a plurality of second common wirings connected to each of the first common wirings of the plurality of piezoelectric element rows, and a plurality of auxiliary wirings buried in a groove portion formed in the wiring substrate. The auxiliary wirings are connected to each of the second common wirings, and the plurality of auxiliary wirings are not connected to each other.Type: GrantFiled: February 1, 2017Date of Patent: December 19, 2017Assignee: Seiko Epson CorporationInventors: Eiju Hirai, Motoki Takabe, Katsutomo Tsukahara, Yoichi Naganuma, Munehide Saimen
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Publication number: 20170313074Abstract: A MEMS device includes a first substrate in which a first electrode layer, a dielectric layer, and a second electrode layer are stacked on a driving region in this order; and a second substrate which is disposed to face a surface on which the dielectric layer of the first substrate is stacked. The first electrode layer and the dielectric layer extend beyond the second electrode layer toward a non-driving region separated from the driving region, a first resin having elasticity is disposed in a region including an end of the second electrode layer in an extending direction of the dielectric layer, and the first substrate and the second substrate are fixed with an adhesive in a state where the elastically deformed first resin is sandwiched therebetween.Type: ApplicationFiled: April 20, 2017Publication date: November 2, 2017Inventors: Munehide SAIMEN, Eiju HIRAI, Masao NAKAYAMA
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Patent number: 9770907Abstract: A MEMS device includes a drive region having a stacked structural body in which a first electrode layer, a first dielectric layer, and a second electrode layer are stacked in that order. The stacked structural body extends from the drive region to a non-drive region that is outer than the drive region and, in an extending direction of the stacked structural body, the first electrode layer and the first dielectric layer extend farther outward than the second electrode layer. A second dielectric layer covering an end of the second electrode layer in the extending direction is stacked on the second electrode layer in the non-drive region and the first dielectric layer that is formed outer in the extending direction than the second electrode layer. A third electrode layer electrically connected to the second electrode layer is stacked on the second dielectric layer and on the second electrode layer in a region outside the second dielectric layer.Type: GrantFiled: November 17, 2016Date of Patent: September 26, 2017Assignee: Seiko Epson CorporationInventors: Katsutomo Tsukahara, Motoki Takabe, Eiju Hirai, Masao Nakayama, Munehide Saimen
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Publication number: 20170266971Abstract: A piezoelectric device includes an actuator substrate that includes two rows of piezoelectric element rows piezoelectric elements, and a wiring substrate that is disposed so as to face the actuator substrate. The piezoelectric element rows include individual electrodes disposed for each of the piezoelectric elements, and a common electrode common to the piezoelectric elements. The wiring substrate includes a core portion disposed on a surface on the actuator substrate side, an individual wiring portion disposed for each of the piezoelectric element rows that partially covers the core portion, and a common wiring portion disposed for each of the piezoelectric element rows that partially covers the core portion. The two rows of piezoelectric element rows are respectively disposed so as to interpose the core portion. The individual wiring portion and the common wiring portion are respectively electrically connected to the individual electrode and the common electrode.Type: ApplicationFiled: March 6, 2017Publication date: September 21, 2017Inventors: Eiju HIRAI, Motoki TAKABE, Katsutomo TSUKAHARA, Yoichi NAGANUMA, Munehide SAIMEN
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Publication number: 20170266972Abstract: A piezoelectric device includes an actuator substrate that includes a plurality of piezoelectric element rows having a plurality of piezoelectric elements, and a wiring substrate that is disposed so as to face the actuator substrate. The piezoelectric element rows include a plurality of individual electrodes disposed for each of the piezoelectric elements, and a common electrodes common to the plurality of piezoelectric elements. The wiring substrate includes a core portion disposed on a surface on the actuator substrate side, an individual wiring portion that partially covers the core portion, a common wiring portion that partially covers the core portion, and an auxiliary wiring disposed in a groove portion disposed on a first principal surface on the side opposite to the actuator substrate or on a second principal surface on the actuator substrate side. The auxiliary wiring is electrically connected to the common wiring portion.Type: ApplicationFiled: March 7, 2017Publication date: September 21, 2017Inventors: Eiju HIRAI, Motoki TAKABE, Katsutomo TSUKAHARA, Yoichi NAGANUMA, Munehide SAIMEN
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Publication number: 20170225464Abstract: A piezoelectric device includes an actuator substrate that includes a plurality of piezoelectric element rows having a plurality of piezoelectric elements, and a wiring substrate that is disposed so as to face the actuator substrate. The piezoelectric element rows include a common electrodes common to the plurality of the piezoelectric elements. The actuator substrate includes a plurality of first common wirings connected to each of the common electrodes of the plurality of the piezoelectric element rows. The wiring substrate includes a plurality of second common wirings connected to each of the first common wirings of the plurality of piezoelectric element rows, and a plurality of auxiliary wirings buried in a groove portion formed in the wiring substrate. The auxiliary wirings are connected to each of the second common wirings, and the plurality of auxiliary wirings are not connected to each other.Type: ApplicationFiled: February 1, 2017Publication date: August 10, 2017Inventors: Eiju HIRAI, Motoki TAKABE, Katsutomo TSUKAHARA, Yoichi NAGANUMA, Munehide SAIMEN
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Publication number: 20170217175Abstract: A MEMS device includes a plurality of movable regions, wiring lines extending along a first direction from the movable regions, and electrodes connected to the wiring lines. The electrodes include connection regions for connecting other electrode terminals to the connection regions. A plurality of the connection regions are disposed along a second direction intersecting the first direction. A distance between centers of connection regions that are adjacent in the second direction is longer than a distance between centers of movable regions that are adjacent in the second direction.Type: ApplicationFiled: January 30, 2017Publication date: August 3, 2017Inventors: Eiju HIRAI, Motoki TAKABE, Katsutomo TSUKAHARA, Yoichi NAGANUMA, Munehide SAIMEN
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Patent number: 9684197Abstract: An electro-optic device includes: a liquid crystal panel which includes an element substrate, a facing substrate arranged so as to face the element substrate with a sealing material interposed therebetween, and a liquid crystal layer sealed in a region surrounded by the sealing material; and a mold which covers an outer circumference of the liquid crystal panel and functions as a mold, in which the mold covers a region, which is overlapped with at least a part of the sealing material in a plan view, from an end of the element substrate and an end of the facing substrate on a surface of the element substrate on an opposite side to the liquid crystal layer and a surface of the facing substrate on an opposite side to the liquid crystal layer, and in which a surface of the mold has liquid repellency.Type: GrantFiled: December 3, 2014Date of Patent: June 20, 2017Assignee: Seiko Epson CorporationInventor: Munehide Saimen
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Publication number: 20170144442Abstract: A MEMS device includes a drive region having a stacked structural body in which a first electrode layer, a first dielectric layer, and a second electrode layer are stacked in that order. The stacked structural body extends from the drive region to a non-drive region that is outer than the drive region and, in an extending direction of the stacked structural body, the first electrode layer and the first dielectric layer extend farther outward than the second electrode layer. A second dielectric layer covering an end of the second electrode layer in the extending direction is stacked on the second electrode layer in the non-drive region and the first dielectric layer that is formed outer in the extending direction than the second electrode layer. A third electrode layer electrically connected to the second electrode layer is stacked on the second dielectric layer and on the second electrode layer in a region outside the second dielectric layer.Type: ApplicationFiled: November 17, 2016Publication date: May 25, 2017Inventors: Katsutomo TSUKAHARA, Motoki TAKABE, Eiju HIRAI, Masao NAKAYAMA, Munehide SAIMEN
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Publication number: 20150160505Abstract: An electro-optic device includes: a liquid crystal panel which includes an element substrate, a facing substrate arranged so as to face the element substrate with a sealing material interposed therebetween, and a liquid crystal layer sealed in a region surrounded by the sealing material; and a mold which covers an outer circumference of the liquid crystal panel and functions as a mold, in which the mold covers a region, which is overlapped with at least a part of the sealing material in a plan view, from an end of the element substrate and an end of the facing substrate on a surface of the element substrate on an opposite side to the liquid crystal layer and a surface of the facing substrate on an opposite side to the liquid crystal layer, and in which a surface of the mold has liquid repellency.Type: ApplicationFiled: December 3, 2014Publication date: June 11, 2015Inventor: Munehide Saimen
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Patent number: 8675372Abstract: In at least one embodiment of the disclosure, an electrooptic device includes first and second mounting terminals arranged on a terminal portion to be aligned in a direction intersecting with a side of the electrooptic substrate. A first flexible substrate is connected to the first mounting terminal. A second flexible substrate is connected to the second mounting terminal and arranged to be superimposed on the first flexible substrate. A resin member covers the first flexible substrate, the second flexible substrate and the electrooptic substrate.Type: GrantFiled: March 13, 2012Date of Patent: March 18, 2014Assignee: Seiko Epson CorporationInventor: Munehide Saimen
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Patent number: 8640582Abstract: A method for manufacturing a flexible substrate includes punching out a flexible substrate from a flexible tape wherein the flexible substrate has a first contour that is a part of a contour of the flexible substrate, and a second contour that is a remaining portion of the contour other than the first contour, and requires a punching accuracy lower than a punching accuracy of the first contour.Type: GrantFiled: January 8, 2009Date of Patent: February 4, 2014Assignee: Seiko Epson CorporationInventor: Munehide Saimen