Patents by Inventor Munekatsu Nakagawa
Munekatsu Nakagawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8530958Abstract: A semiconductor device having a non-volatile memory is disclosed, whose disturb defect can be diminished or prevented. A memory cell of the non-volatile memory has a memory gate electrode formed over a main surface of a semiconductor substrate through an insulating film for charge storage. A first side wall is formed on a side face of the memory gate electrode, and at a side face of the first side wall, a second side wall is formed. On an upper surface of an n+-type semiconductor region for source in the memory cell there is formed a silicide layer whose end portion on the memory gate electrode MG side is defined by the second side wall.Type: GrantFiled: March 5, 2010Date of Patent: September 10, 2013Assignee: Renesas Electronics CorporationInventors: Koichi Toba, Yasushi Ishii, Yoshiyuki Kawashima, Satoru Machida, Munekatsu Nakagawa, Kentaro Saito, Toshikazu Matsui, Takashi Hashimoto, Kosuke Okuyama
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Patent number: 8497547Abstract: Provided is a semiconductor device having, over a semiconductor substrate, a control gate electrode and a memory gate electrode which are adjacent to each other and constitute a nonvolatile memory. The height of the memory gate electrode is lower than the height of the control gate electrode. A metal silicide film is formed over the upper surface of the control gate electrode, but not formed over the upper surface of the memory gate electrode. The memory gate electrode has, over the upper surface thereof, a sidewall insulating film made of silicon oxide. This sidewall insulating film is formed in the same step as that for the formation of respective sidewall insulating films over the sidewalls of the memory gate electrode and the control gate electrode. The present invention makes it possible to improve the production yield and performance of the semiconductor device having a nonvolatile memory.Type: GrantFiled: August 21, 2012Date of Patent: July 30, 2013Assignee: Renesas Electronics CorporationInventors: Koichi Toba, Yasushi Ishii, Yoshiyuki Kawashima, Satoru Machida, Munekatsu Nakagawa, Takashi Hashimoto
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Patent number: 8390048Abstract: For enhancing the high performance of a non-volatile semiconductor memory device having an MONOS type transistor, a non-volatile semiconductor memory device is provided with MONOS type transistors having improved performance in which the memory cell of an MONOS non-volatile memory comprises a control transistor and a memory transistor. A control gate of the control transistor comprises an n-type polycrystal silicon film and is formed over a gate insulative film comprising a silicon oxide film. A memory gate of the memory transistor comprises an n-type polycrystal silicon film and is disposed on one of the side walls of the control gate. The memory gate comprises a doped polycrystal silicon film with a sheet resistance lower than that of the control gate comprising a polycrystal silicon film formed by ion implantation of impurities to the undoped silicon film.Type: GrantFiled: October 14, 2010Date of Patent: March 5, 2013Assignee: Renesas Electronics CorporationInventors: Takeshi Sakai, Yasushi Ishii, Tsutomu Okazaki, Masaru Nakamichi, Toshikazu Matsui, Kyoya Nitta, Satoru Machida, Munekatsu Nakagawa, Yuichi Tsukada
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Publication number: 20120313160Abstract: Provided is a semiconductor device having, over a semiconductor substrate, a control gate electrode and a memory gate electrode which are adjacent to each other and constitute a nonvolatile memory. The height of the memory gate electrode is lower than the height of the control gate electrode. A metal silicide film is formed over the upper surface of the control gate electrode, but not formed over the upper surface of the memory gate electrode. The memory gate electrode has, over the upper surface thereof, a sidewall insulating film made of silicon oxide. This sidewall insulating film is formed in the same step as that for the formation of respective sidewall insulating films over the sidewalls of the memory gate electrode and the control gate electrode. The present invention makes it possible to improve the production yield and performance of the semiconductor device having a nonvolatile memory.Type: ApplicationFiled: August 21, 2012Publication date: December 13, 2012Inventors: Koichi TOBA, Yasushi Ishii, Yoshiyuki Kawashima, Satoru Machida, Munekatsu Nakagawa, Takashi Hashimoto
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Patent number: 8269266Abstract: Provided is a semiconductor device having, over a semiconductor substrate, a control gate electrode and a memory gate electrode which are adjacent to each other and constitute a nonvolatile memory. The height of the memory gate electrode is lower than the height of the control gate electrode. A metal silicide film is formed over the upper surface of the control gate electrode, but not formed over the upper surface of the memory gate electrode. The memory gate electrode has, over the upper surface thereof, a sidewall insulating film made of silicon oxide. This sidewall insulating film is formed in the same step as that for the formation of respective sidewall insulating films over the sidewalls of the memory gate electrode and the control gate electrode. The present invention makes it possible to improve the production yield and performance of the semiconductor device having a nonvolatile memory.Type: GrantFiled: June 28, 2010Date of Patent: September 18, 2012Assignee: Renesas Electronics CorporationInventors: Koichi Toba, Yasushi Ishii, Yoshiyuki Kawashima, Satoru Machida, Munekatsu Nakagawa, Takashi Hashimoto
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Publication number: 20110024820Abstract: For enhancing the high performance of a non-volatile semiconductor memory device having an MONOS type transistor, a non-volatile semiconductor memory device is provided with MONOS type transistors having improved performance in which the memory cell of an MONOS non-volatile memory comprises a control transistor and a memory transistor. A control gate of the control transistor comprises an n-type polycrystal silicon film and is formed over a gate insulative film comprising a silicon oxide film. A memory gate of the memory transistor comprises an n-type polycrystal silicon film and is disposed on one of the side walls of the control gate. The memory gate comprises a doped polycrystal silicon film with a sheet resistance lower than that of the control gate comprising a polycrystal silicon film formed by ion implantation of impurities to the undoped silicon film.Type: ApplicationFiled: October 14, 2010Publication date: February 3, 2011Inventors: Takeshi SAKAI, Yasushi ISHII, Tsutomu OKAZAKI, Masaru NAKAMICHI, Toshikazu MATSUI, Kyoya NITTA, Satoru MACHIDA, Munekatsu NAKAGAWA, Yuichi TSUKADA
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Patent number: 7863135Abstract: For enhancing the high performance of a non-volatile semiconductor memory device having an MONOS type transistor, a non-volatile semiconductor memory device is provided with MONOS type transistors having improved performance in which the memory cell of an MONOS non-volatile memory comprises a control transistor and a memory transistor. A control gate of the control transistor comprises an n-type polycrystal silicon film and is formed over a gate insulative film comprising a silicon oxide film. A memory gate of the memory transistor comprises an n-type polycrystal silicon film and is disposed on one of the side walls of the control gate. The memory gate comprises a doped polycrystal silicon film with a sheet resistance lower than that of the control gate comprising a polycrystal silicon film formed by ion implantation of impurities to the undoped silicon film.Type: GrantFiled: February 16, 2010Date of Patent: January 4, 2011Assignee: Renesas Electronics CorporationInventors: Takeshi Sakai, Yasushi Ishii, Tsutomu Okazaki, Masaru Nakamichi, Toshikazu Matsui, Kyoya Nitta, Satoru Machida, Munekatsu Nakagawa, Yuichi Tsukada
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Publication number: 20100264479Abstract: Provided is a semiconductor device having, over a semiconductor substrate, a control gate electrode and a memory gate electrode which are adjacent to each other and constitute a nonvolatile memory. The height of the memory gate electrode is lower than the height of the control gate electrode. A metal silicide film is formed over the upper surface of the control gate electrode, but not formed over the upper surface of the memory gate electrode. The memory gate electrode has, over the upper surface thereof, a sidewall insulating film made of silicon oxide. This sidewall insulating film is formed in the same step as that for the formation of respective sidewall insulating films over the sidewalls of the memory gate electrode and the control gate electrode. The present invention makes it possible to improve the production yield and performance of the semiconductor device having a nonvolatile memory.Type: ApplicationFiled: June 28, 2010Publication date: October 21, 2010Inventors: Koichi TOBA, Yasushi ISHII, Yoshiyuki KAWASHIMA, Satoru MACHIDA, Munekatsu NAKAGAWA, Takashi HASHIMOTO
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Publication number: 20100237404Abstract: A semiconductor device having a non-volatile memory is disclosed, whose disturb defect can be diminished or prevented. A memory cell of the non-volatile memory has a memory gate electrode formed over a main surface of a semiconductor substrate through an insulating film for charge storage. A first side wall is formed on a side face of the memory gate electrode, and at a side face of the first side wall, a second side wall is formed. On an upper surface of an n+-type semiconductor region for source in the memory cell there is formed a silicide layer whose end portion on the memory gate electrode MG side is defined by the second side wall.Type: ApplicationFiled: March 5, 2010Publication date: September 23, 2010Inventors: KOICHI TOBA, Yasushi Ishii, Yoshiyuki Kawashima, Satoru Machida, Munekatsu Nakagawa, Kentaro Saito, Toshikazu Matsui, Takashi Hashimoto, Kosuke Okuyama
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Patent number: 7767522Abstract: Provided is a semiconductor device having, over a semiconductor substrate, a control gate electrode and a memory gate electrode which are adjacent to each other and constitute a nonvolatile memory. The height of the memory gate electrode is lower than the height of the control gate electrode. A metal silicide film is formed over the upper surface of the control gate electrode, but not formed over the upper surface of the memory gate electrode. The memory gate electrode has, over the upper surface thereof, a sidewall insulating film made of silicon oxide. This sidewall insulating film is formed in the same step as that for the formation of respective sidewall insulating films over the sidewalls of the memory gate electrode and the control gate electrode. The present invention makes it possible to improve the production yield and performance of the semiconductor device having a nonvolatile memory.Type: GrantFiled: March 8, 2007Date of Patent: August 3, 2010Assignee: Renesas Technology Corp.Inventors: Koichi Toba, Yasushi Ishii, Yoshiyuki Kawashima, Satoru Machida, Munekatsu Nakagawa, Takashi Hashimoto
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Patent number: 7745288Abstract: A semiconductor device having a non-volatile memory is disclosed, whose disturb defect can be diminished or prevented. A memory cell of the non-volatile memory has a memory gate electrode formed over a main surface of a semiconductor substrate through an insulating film for charge storage. A first side wall is formed on a side face of the memory gate electrode, and at a side face of the first side wall, a second side wall is formed. On an upper surface of an n+-type semiconductor region for source in the memory cell there is formed a silicide layer whose end portion on the memory gate electrode MG side is defined by the second side wall.Type: GrantFiled: March 13, 2007Date of Patent: June 29, 2010Assignee: Renesas Technology Corp.Inventors: Koichi Toba, Yasushi Ishii, Yoshiyuki Kawashima, Satoru Machida, Munekatsu Nakagawa, Kentaro Saito, Toshikazu Matsui, Takashi Hashimoto, Kosuke Okuyama
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Publication number: 20100144108Abstract: For enhancing the high performance of a non-volatile semiconductor memory device having an MONOS type transistor, a non-volatile semiconductor memory device is provided with MONOS type transistors having improved performance in which the memory cell of an MONOS non-volatile memory comprises a control transistor and a memory transistor. A control gate of the control transistor comprises an n-type polycrystal silicon film and is formed over a gate insulative film comprising a silicon oxide film. A memory gate of the memory transistor comprises an n-type polycrystal silicon film and is disposed on one of the side walls of the control gate. The memory gate comprises a doped polycrystal silicon film with a sheet resistance lower than that of the control gate comprising a polycrystal silicon film formed by ion implantation of impurities to the undoped silicon film.Type: ApplicationFiled: February 16, 2010Publication date: June 10, 2010Inventors: Takeshi SAKAI, Yasushi Ishii, Tsutomu Okazaki, Masaru Nakamichi, Toshikazu Matsui, Kyoya Nitta, Satoru Machida, Munekatsu Nakagawa, Yuichi Tsukada
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Patent number: 7663176Abstract: For enhancing the high performance of a non-volatile semiconductor memory device having an MONOS type transistor, a non-volatile semiconductor memory device is provided with MONOS type transistors having improved performance in which the memory cell of an MONOS non-volatile memory comprises a control transistor and a memory transistor. A control gate of the control transistor comprises an n-type polycrystal silicon film and is formed over a gate insulative film comprising a silicon oxide film. A memory gate of the memory transistor comprises an n-type polycrystal silicon film and is disposed on one of the side walls of the control gate. The memory gate comprises a doped polycrystal silicon film with a sheet resistance lower than that of the control gate comprising a polycrystal silicon film formed by ion implantation of impurities to the undoped silicon film.Type: GrantFiled: May 2, 2008Date of Patent: February 16, 2010Assignee: Renesas Technology Corp.Inventors: Takeshi Sakai, Yasushi Ishii, Tsutomu Okazaki, Masaru Nakamichi, Toshikazu Matsui, Kyoya Nitta, Satoru Machida, Munekatsu Nakagawa, Yuichi Tsukada
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Publication number: 20080203466Abstract: For enhancing the high performance of a non-volatile semiconductor memory device having an MONOS type transistor, a non-volatile semiconductor memory device is provided with MONOS type transistors having improved performance in which the memory cell of an MONOS non-volatile memory comprises a control transistor and a memory transistor. A control gate of the control transistor comprises an n-type polycrystal silicon film and is formed over a gate insulative film comprising a silicon oxide film. A memory gate of the memory transistor comprises an n-type polycrystal silicon film and is disposed on one of the side walls of the control gate. The memory gate comprises a doped polycrystal silicon film with a sheet resistance lower than that of the control gate comprising a polycrystal silicon film formed by ion implantation of impurities to the undoped silicon film.Type: ApplicationFiled: May 2, 2008Publication date: August 28, 2008Inventors: Takeshi SAKAI, Yasushi Ishii, Tsutomu Okazaki, Masaru Nakamichi, Toshikazu Matsui, Kyoya Nitta, Satoru Machida, Munekatsu Nakagawa, Yuichi Tsukada
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Publication number: 20080206975Abstract: For enhancing the high performance of a non-volatile semiconductor memory device having an MONOS type transistor, a non-volatile semiconductor memory device is provided with MONOS type transistors having improved performance in which the memory cell of an MONOS non-volatile memory comprises a control transistor and a memory transistor. A control gate of the control transistor comprises an n-type polycrystal silicon film and is formed over a gate insulative film comprising a silicon oxide film. A memory gate of the memory transistor comprises an n-type polycrystal silicon film and is disposed on one of the side walls of the control gate. The memory gate comprises a doped polycrystal silicon film with a sheet resistance lower than that of the control gate comprising a polycrystal silicon film formed by ion implantation of impurities to the undoped silicon film.Type: ApplicationFiled: May 2, 2008Publication date: August 28, 2008Inventors: Takeshi SAKAI, Yasushi Ishii, Tsutomu Okazaki, Masaru Nakamichi, Toshikazu Matsui, Kyoya Nitta, Satoru Machida, Munekatsu Nakagawa, Yuichi Tsukada
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Patent number: 7371631Abstract: For enhancing the high performance of a non-volatile semiconductor memory device having an MONOS type transistor, a non-volatile semiconductor memory device is provided with MONOS type transistors having improved performance in which the memory cell of an MONOS non-volatile memory comprises a control transistor and a memory transistor. A control gate of the control transistor comprises an n-type polycrystal silicon film and is formed over a gate insulative film comprising a silicon oxide film. A memory gate of the memory transistor comprises an n-type polycrystal silicon film and is disposed on one of the side walls of the control gate. The memory gate comprises a doped polycrystal silicon film with a sheet resistance lower than that of the control gate comprising a polycrystal silicon film formed by ion implantation of impurities to the undoped silicon film.Type: GrantFiled: June 29, 2005Date of Patent: May 13, 2008Assignee: Renesas Technology Corp.Inventors: Takeshi Sakai, Yasushi Ishii, Tsutomu Okazaki, Masaru Nakamichi, Toshikazu Matsui, Kyoya Nitta, Satoru Machida, Munekatsu Nakagawa, Yuichi Tsukada
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Publication number: 20080029825Abstract: Even if it is the semiconductor device provided with the wiring on an isolation insulating film, the sidewall formed on the side surface of this wiring, and the shared contact which connects the wiring and the impurity diffusion on an active region, the semiconductor device which can suppress the generation of the leakage current from shared contact to a semiconductor substrate, and its manufacturing method are offered.Type: ApplicationFiled: August 2, 2007Publication date: February 7, 2008Inventors: Kentaro Saito, Yasushi Ishii, Munekatsu Nakagawa, Satoru Machida, Masaru Nakamichi
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Publication number: 20070228446Abstract: A semiconductor device having a non-volatile memory is disclosed, whose disturb defect can be diminished or prevented. A memory cell of the non-volatile memory has a memory gate electrode formed over a main surface of a semiconductor substrate through an insulating film for charge storage. A first side wall is formed on a side face of the memory gate electrode, and at a side face of the first side wall, a second side wall is formed. On an upper surface of an n+-type semiconductor region for source in the memory cell there is formed a silicide layer whose end portion on the memory gate electrode MG side is defined by the second side wall.Type: ApplicationFiled: March 13, 2007Publication date: October 4, 2007Inventors: Koichi Toba, Yasushi Ishii, Yoshiyuki Kawashima, Satoru Machida, Munekatsu Nakagawa, Kentaro Saito, Toshikazu Matsui, Takashi Hashimoto, Kosuke Okuyama
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Publication number: 20070228498Abstract: Provided is a semiconductor device having, over a semiconductor substrate, a control gate electrode and a memory gate electrode which are adjacent to each other and constitute a nonvolatile memory. The height of the memory gate electrode is lower than the height of the control gate electrode. A metal silicide film is formed over the upper surface of the control gate electrode, but not formed over the upper surface of the memory gate electrode. The memory gate electrode has, over the upper surface thereof, a sidewall insulating film made of silicon oxide. This sidewall insulating film is formed in the same step as that for the formation of respective sidewall insulating films over the sidewalls of the memory gate electrode and the control gate electrode. The present invention makes it possible to improve the production yield and performance of the semiconductor device having a nonvolatile memory.Type: ApplicationFiled: March 8, 2007Publication date: October 4, 2007Inventors: Koichi Toba, Yasushi Ishii, Yoshiyuki Kawashima, Satoru Machida, Munekatsu Nakagawa, Takashi Hashimoto
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Publication number: 20060003508Abstract: For enhancing the high performance of a non-volatile semiconductor memory device having an MONOS type transistor, a non-volatile semiconductor memory device is provided with MONOS type transistors having improved performance in which the memory cell of an MONOS non-volatile memory comprises a control transistor and a memory transistor. A control gate of the control transistor comprises an n-type polycrystal silicon film and is formed over a gate insulative film comprising a silicon oxide film. A memory gate of the memory transistor comprises an n-type polycrystal silicon film and is on one of the side walls of the control gate. The memory gate comprises a doped polycrystal silicon film with a sheet resistance lower than that of the control gate comprising a polycrystal silicon film formed by ion implantation of impurities to the undoped silicon film.Type: ApplicationFiled: June 29, 2005Publication date: January 5, 2006Inventors: Takeshi Sakai, Yasushi Ishii, Tsutomu Okazaki, Masaru Nakamichi, Toshikazu Matsui, Kyoya Nitta, Satoru Machida, Munekatsu Nakagawa, Yuichi Tsukada