Abstract: In a charged particle beam apparatus is provided with an optical image capturing apparatus having an angle different from that of a column, a sample may collide with other components when the sample is faced toward the optical image capturing apparatus. The charged particle beam apparatus includes a stage configured to place a sample thereon and to move the sample inside a sample chamber; a column configured to observe the sample by irradiating a charged particle beam on the sample; a first image capturing apparatus configured to observe a surface of the sample irradiated with the charged particle beam from an angle different from that of the column; and a control unit configured to, when observing the sample via the first image capturing apparatus, separate the sample from the column and to tilt the sample through the stage to face toward the first image capturing apparatus.

Abstract: There is provided a technology for imparting attenuation while maintaining rigidity of a support member that reduces vibration of a sample stage when disturbance such as an environmental sound is applied to a device and vibrates the sample stage. A charged particle beam device according to the present disclosure includes a sample stage that can move a sample, an attenuation unit that attenuates vibration of the sample stage, and a sample chamber that stores the sample stage and the attenuation unit. In the charged particle beam device, the sample stage and the attenuation unit are disposed so as to be horizontal to each other. Also, the sample stage is configured to be supported so as to be sandwiched between the attenuation unit and a first side surface of a casing, and the inside of the casing of the attenuation unit is filled with a plural number of friction bodies.

Abstract: In a charged particle beam apparatus is provided with an optical image capturing apparatus having an angle different from that of a column, a sample may collide with other components when the sample is faced toward the optical image capturing apparatus. The charged particle beam apparatus includes a stage configured to place a sample thereon and to move the sample inside a sample chamber; a column configured to observe the sample by irradiating a charged particle beam on the sample; a first image capturing apparatus configured to observe a surface of the sample irradiated with the charged particle beam from an angle different from that of the column; and a control unit configured to, when observing the sample via the first image capturing apparatus, separate the sample from the column and to tilt the sample through the stage to face toward the first image capturing apparatus.