Patents by Inventor Munekazu Matsuo

Munekazu Matsuo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Microwave-excited plasma processing apparatus
    Patent number: 7392760
    Abstract: A microwave-excited plasma processing apparatus shows a wide pressure range and a wide applicable electric power range for normal electric discharges as a result of using slits cut through a rectangular waveguide and having a profile that allows the electric field and the magnetic field of microwave to be formed uniformly right below the microwave introducing window below an microwave antenna. The microwave-excited plasma processing apparatus is characterized by having four elliptic slits cut through the wall of the rectangular waveguide that is held in contact with the microwave introducing window of the top wall of the vacuum chamber, the four elliptic slits being arranged respectively along the four sides of a substantial square.
    Type: Grant
    Filed: November 16, 2004
    Date of Patent: July 1, 2008
    Assignee: ULVAC, Inc.
    Inventors: Yoji Taguchi, Maiko Yoshida, Kohta Kusaba, Kibatsu Shinohara, Munekazu Matsuo, Kazuhiro Watanabe
  • Microwave-excited plasma processing apparatus
    Publication number: 20050145178
    Abstract: A microwave-excited plasma processing apparatus shows a wide pressure range and a wide applicable electric power range for normal electric discharges as a result of using slits cut through a rectangular waveguide and having a profile that allows the electric field and the magnetic field of microwave to be formed uniformly right below the microwave introducing window below an microwave antenna. The microwave-excited plasma processing apparatus is characterized by having four elliptic slits cut through the wall of the rectangular waveguide that is held in contact with the microwave introducing window of the top wall of the vacuum chamber, the four elliptic slits being arranged respectively along the four sides of a substantial square.
    Type: Application
    Filed: November 16, 2004
    Publication date: July 7, 2005
    Inventors: Yoji Taguchi, Maiko Yoshida, Kohta Kusaba, Kibatsu SHinohara, Munekazu Matsuo, Kazuhiro Watanabe