Patents by Inventor Munemoto Hagiwara

Munemoto Hagiwara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • FILM-FORMING APPARATUS, AND METHOD FOR MAINTAINING FILM-FORMING APPARATUS
    Publication number: 20130199572
    Abstract: Ignition sections are provided at two locations on each of lower portions of the side surfaces on both sides of a film-forming chamber so as to be provided at four locations in total. A flowing current is applied to the ignition sections when a flammable by-product is ignited. A first detecting section for measuring a pressure in the film-forming chamber is formed on the side surface of the film-forming chamber. A second detecting section is formed at the lower portion of the side surface of the film-forming chamber. A third detecting section for measuring a spatial temperature in the film-forming chamber is formed at an upper portion of the film-forming chamber.
    Type: Application
    Filed: June 22, 2011
    Publication date: August 8, 2013
    Applicant: ULVAC, INC.
    Inventors: Takuro Hayashi, Kouji Sogabe, Koichi Matsumoto, Masanori Hashimoto, Kyuzo Nakamura, Munemoto Hagiwara, Hiroto Uchida, Katsuhiko Mori, Yasuo Shimizu, Moriaki Sakamoto