Abstract: A vertical XY stage includes a base, an X-axis slider, a Y-axis slider, and a stage. The X-axis slider is movably mounted on the base. The Y-axis slider is movably mounted on the X-axis slider. Workpieces are arranged on the stage. The Y-axis slider includes a horizontally arranged slider main body, and a vertical portion vertically arranged and having a guide for allowing the Y-axis slider to move in a Y-axis direction. The stage is arranged in a space surrounded by the slider main body and the vertical portion of the Y-axis slider. The stage can be pivoted through a shaft mounted on the Y-axis slider.

Abstract: A static pressure lead screw includes a porous ceramic body having fluid flow paths as part of a flank. The porous ceramic body is fixed by a tubular base member through which the fluid does not flow. Fluid guide holes for supplying the fluid to the porous body extend through the tubular base member and are connected to the porous body. In a preferred embodiment, an electroless-plated layer is formed in a surface layer of the flank or an inner portion continuous with the surface layer, thereby obtaining various high-accuracy static pressure guides with high statical stiffness.