Abstract: A substrate processing apparatus includes: a chamber; and a processing gas supply unit connected to the chamber via a processing gas supply flow path and configured to supply a processing gas. The processing gas supply unit includes a raw material cartridge that includes a raw material tank that accommodates a porous member containing a metal-organic framework adsorbed with gas molecules of a raw material of the processing gas; a main body configured to communicate the raw material tank and the processing gas supply flow path with each other when the raw material cartridge is attached; and a desorption mechanism configured to desorb the gas molecules of the raw material of the processing gas and allow the gas molecules to flow out as the processing gas to the processing gas supply flow path while the raw material cartridge is attached to the main body.

Abstract: A frame of a work vehicle includes an upper plate that has a plate shape and that forms an upper surface of the frame extending along a front-rear direction; a lower plate that has a plate shape and that is opposite to the upper plate in an up-down direction and forms a lower surface of the frame; a vertical wall that is disposed between the upper plate and the lower plate in the up-down direction and connects the upper plate to the lower plate; and an attachment portion to which an actuator that moves work equipment in the up-down direction is attached, in which at least one of the upper plate and the lower plate includes a center portion, a first extension portion extending from the center portion, a second extension portion extending from the center portion, and a continuous portion connecting the first extension portion to the second extension portion.

Abstract: A substrate processing apparatus includes: a chamber; a raw material tank in which a raw material of a processing gas is accommodated; a carrier gas supply unit that supplies a carrier gas to the raw material tank; a mixed gas flow path connected to the raw material tank, and through which a mixed gas of the processing gas obtained from the raw material of the processing gas and the carrier gas flows therethrough; a concentration tank connected to a downstream of the mixed gas flow path, accommodating a porous member including a metal-organic framework; a desorption mechanism that desorbs the processing gas adsorbed to the porous member; and a concentration gas flow path that allows the processing gas desorbed from the porous member to flow to the chamber.

Abstract: A frame of a work vehicle includes an upper plate that has a plate shape and that forms an upper surface of the frame extending along a front-rear direction; a lower plate that has a plate shape and that is opposite to the upper plate in an up-down direction and forms a lower surface of the frame; a vertical wall that is disposed between the upper plate and the lower plate in the up-down direction and connects the upper plate to the lower plate; and an attachment portion to which an actuator that moves work equipment in the up-down direction is attached, in which at least one of the upper plate and the lower plate includes a center portion, a first extension portion extending from the center portion, a second extension portion extending from the center portion, and a continuous portion connecting the first extension portion to the second extension portion.

Abstract: A work vehicle includes a blade, a shutter, a notification unit, and a controller. The blade includes a lower end. The shutter is attached to the blade. The shutter can be alternatively disposed at a first position at which the shutter protrudes forward from the lower end of the blade or at a second position at which the shutter is farther away from the lower end than at the first position. The notification unit is configured to notify surroundings of the work vehicle about information of the work vehicle. The controller is configured to change information notified by the notification unit in accordance with an arrangement of the shutter at one of the first position and the second position.

Abstract: A work vehicle allowing a simplified operation to open and close a shutter in a simple configuration is provided. The shutter can be disposed alternatively at a first position at which the shutter protrudes forward from a lower end of a blade or at a second position at which the shutter is farther away from the lower end than at the first position. The controller is configured to receive an input of an operation instruction from an input operation unit for moving the shutter from the second position to the first position, to cause the shutter to move from the second position to the first position. After a lapse of a prescribed time period since the shutter is moved to the first position, the controller causes the shutter to move from the first position to the second position.

Abstract: A first switch valve is connected to a cap-side circuit of a lift cylinder. A second switch valve is connected to a head-side circuit of the lift cylinder. A first accumulator is connected to the cap-side circuit of the lift cylinder with the first switch valve being interposed. A second accumulator is connected to the head-side circuit of the lift cylinder with the second switch valve being interposed. A third switch valve is connected between the first accumulator and the second accumulator.

Abstract: A work vehicle allowing a simplified operation to open and close a shutter in a simple configuration is provided. The shutter can be disposed alternatively at a first position at which the shutter protrudes forward from a lower end of a blade or at a second position at which the shutter is farther away from the lower end than at the first position. The controller is configured to receive an input of an operation instruction from an input operation unit for moving the shutter from the second position to the first position, to cause the shutter to move from the second position to the first position. After a lapse of a prescribed time period since the shutter is moved to the first position, the controller causes the shutter to move from the first position to the second position.

Abstract: A work vehicle capable of notifying surroundings about information of the work vehicle at appropriate timing is provided. The work vehicle includes a blade, a shutter, a notification unit, and a controller. The blade includes a lower end. The shutter is attached to the blade. The shutter can be alternatively disposed at a first position at which the shutter protrudes forward from the lower end of the blade or at a second position at which the shutter is farther away from the lower end than at the first position. The notification unit is configured to notify surroundings of the work vehicle about information of the work vehicle. The controller is configured to change information notified by the notification unit in accordance with an arrangement of the shutter at one of the first position and the second position.

Abstract: An engine unit mounted to a vehicle frame, the engine unit includes: an engine; an engine support mechanism to be coupled to the vehicle frame, with at least one vibration absorbing mechanism disposed on each of both sides of the engine in an orthogonal direction to a crankshaft of the engine, to support the engine; an aftertreatment device to purify exhaust gas emitted from the engine; a base bracket provided to the engine support mechanism; and an upper bracket detachably fixed and mounted to the base bracket, the upper bracket supporting the aftertreatment device.

Abstract: A method for depositing a film is provided. In the method, an object to be processed is accommodated in a process chamber, and an insulating film made of a polymer thin film is deposited on a surface of the object to be processed by supplying a first source gas composed of an acid anhydride and a second source gas composed of a diamine into the process chamber that is evacuated. Next, the insulating film is modified so as to have a barrier function by stopping the supply of the second source gas into the process chamber and continuously supplying the first source gas into the process chamber.

Abstract: An engine unit mounted to a vehicle frame, the engine unit includes: an engine; an engine support mechanism to be coupled to the vehicle frame, with at least one vibration absorbing mechanism disposed on each of both sides of the engine in an orthogonal direction to a crankshaft of the engine, to support the engine; an aftertreatment device to purify exhaust gas emitted from the engine; a base bracket provided to the engine support mechanism; and an upper bracket detachably fixed and mounted to the base bracket, the upper bracket supporting the aftertreatment device.

Abstract: Disclosed is a pickup method in which a first suction unit is caused to approach and come into contact with a chip adhered to an adhesive sheet, and a second suction unit which is formed with a concavity on a contact surface configured to come into contact with the adhesive sheet is caused to approach and come into contact with the adhesive sheet in such a manner as to be opposite to the first suction unit. The adhesive sheet is sucked by the second suction unit that is in contact with the adhesive sheet, and a fluid is injected between the adhesive sheet and the chip by an injection unit. As a result, the adhesive sheet is detached from a portion of the chip opposite to the concavity, and in the state where the chip is being sucked by the first suction unit, the first suction unit is caused to be spaced away from the adhesive sheet that is being sucked by the second suction unit. In this manner, the chip is detached and picked up from the adhesive sheet.

Abstract: A work vehicle includes an engine, a diesel particulate filter apparatus, a connecting pipe, and a selective catalytic reduction apparatus. The diesel particulate filter apparatus treats exhaust from the engine. The connecting pipe connects the engine and the diesel particulate filter apparatus. The connecting pipe extends obliquely downward toward the diesel particulate filter apparatus from a connecting position with the engine. The selective catalytic reduction apparatus treats the exhaust from the engine. The selective catalytic reduction apparatus is arranged above the connecting pipe.

Abstract: A work vehicle includes an engine, a diesel particulate filter apparatus, a connecting pipe, and a selective catalytic reduction apparatus. The diesel particulate filter apparatus treats exhaust from the engine. The connecting pipe connects the engine and the diesel particulate filter apparatus. The connecting pipe extends obliquely downward toward the diesel particulate filter apparatus from a connecting position with the engine. The selective catalytic reduction apparatus treats the exhaust from the engine. The selective catalytic reduction apparatus is arranged above the connecting pipe.

Abstract: A method for depositing a film is provided. In the method, an object to be processed is accommodated in a process chamber, and an insulating film made of a polymer thin film is deposited on a surface of the object to be processed by supplying a first source gas composed of an acid anhydride and a second source gas composed of a diamine into the process chamber that is evacuated. Next, the insulating film is modified so as to have a barrier function by stopping the supply of the second source gas into the process chamber and continuously supplying the first source gas into the process chamber.

Abstract: A construction vehicle adapted to travel using a wheel and equipped with an exhaust aftertreatment device to which a reductant is supplied is provided. At least a portion of the exhaust aftertreatment device including a front end thereof is located on a fender provided for the wheel. A supply pump adapted to supply the reductant and a reductant tank adapted to store the reductant are located ahead of the fender and below the exhaust aftertreatment device. The reductant tank is located below the supply pump.

Abstract: A work vehicle includes a vehicle frame, a radiator, an engine, a first post-treatment apparatus, a second post-treatment apparatus, and a bracket. The engine is provided in front of the radiator. The first post-treatment apparatus and the second post-treatment apparatus are positioned in front of the radiator and treat exhaust from the engine. The bracket is positioned in front of the radiator and is elastically supported by the vehicle frame. The bracket supports the engine, the first post-treatment apparatus, and the second post-treatment apparatus. Both the highest position of the first post-treatment apparatus and the highest position of the second post-treatment apparatus are no higher than the highest position of the radiator.

Abstract: A work vehicle includes a vehicle frame, a radiator, an engine, a first post-treatment apparatus, a second post-treatment apparatus, and a bracket. The engine is provided in front of the radiator. The first post-treatment apparatus and the second post-treatment apparatus are positioned in front of the radiator and treat exhaust from the engine. The bracket is positioned in front of the radiator and is elastically supported by the vehicle frame. The bracket supports the engine, the first post-treatment apparatus, and the second post-treatment apparatus. Both the highest position of the first post-treatment apparatus and the highest position of the second post-treatment apparatus are no higher than the highest position of the radiator.

Abstract: In a method for forming a sintered silver coating film, for use as a heat spreader, on a semiconductor substrate or a semiconductor package, a coating film of an ink or paste containing silver nanoparticles is formed on one surface of the semiconductor substrate or the substrate package. Further, the coating film is sintered by heating the coating film under an atmosphere of a humidity of 30% to 50% RH (30° C.) by a ventilation oven.