Abstract: An electromagnetic field imaging device according to one aspect of the present disclosure includes a polarizing optical member arranged to face an imaging subject. A modulated light from a laser light source is influenced by an electric field from the imaging subject in the polarizing optical member. The modulated light subjected to the influence of the electric field is imaged as a detection light. The polarizing optical member is supported in a state of being movable in a direction of a plate thickness of the polarizing optical member. The plate thickness of the polarizing optical member is no larger than 1.2 times a minimum void interval of a wiring of the imaging subject.

Abstract: An electromagnetic field imaging device according to one aspect of the present disclosure includes a polarizing optical member arranged to face an imaging subject. A modulated light from a laser light source is influenced by an electric field from the imaging subject in the polarizing optical member. The modulated light subjected to the influence of the electric field is imaged as a detection light. The polarizing optical member is supported in a state of being movable in a direction of a plate thickness of the polarizing optical member. The plate thickness of the polarizing optical member is no larger than 1.2 times a minimum void interval of a wiring of the imaging subject.

Abstract: Thermistor elements composed mainly of a metal oxide sintered body are prepared by mixing a metal oxide precursor in a liquid phase to prepare a solution or slurry of the precursor. The precursor solution or slurry is sprayed to form droplet particles which are heat treated to form a thermistor raw material powder which powder is then molded and sintered into a shape to provide a metal oxide sintered body.

Abstract: When producing a ceramic element formed of a metal oxide sintered body as a principal component thereof, this invention contemplates to make further uniform a composition of a ceramic raw material and to reduce the variance of a resistance value of the ceramic element. A production method of the invention comprises a step of preparing a precursor solution by mixing a precursor of a metal oxide in a liquid phase, a step of spraying the precursor solution and obtaining droplet particles, a step of heat-treating the droplet particles and obtaining thermistor raw material powder, and a step of molding and sintering the thermistor raw material powder into a predetermined shape and obtaining a metal oxide sintered body.

Abstract: A semiconductor angular velocity sensor has a frame-shaped base portion, a detection oscillator connected to the base portion through a detection beam portion, and a drive oscillator connected to the detection oscillator through a drive beam portion. Each of the beam portions has a pair of beams each generally having a U shape and connected to each other through a bridge portion. Accordingly, the beam portions can have large rotational rigidity not to prevent oscillations of the oscillators.

Abstract: A pressed-contact type semiconductor device in which a main electrode surface of a semiconductor element is contacted with an electrode plate by a pressed-contact, which can reduce both an electric resistance and a thermal resistance between the main electrode surface of the semiconductor element and the electrode plate. The pressed-contact type semiconductor device (100) is provided with a semiconductor element (1) having electrode surfaces, a pair of electrode plates (2) contacted with the electrode surfaces by the pressed-contact, a pair of insulating plates (3) contacted with the outer side of the pair of the electrode plates by the pressed-contact, and a pair of radiating plates (4) contacted with the outer side of the pair of the insulating plates by the pressed-contact. A contact intermediary member (5), which is made up of particle member having at least thermal conductivity and electric conductivity, is intercalated between the semiconductor element and the electrode plate.

Abstract: An angular velocity sensor includes a tuning-fork oscillator having a pair of arms jointed by a trunk, the pair of arms extending in parallel to each other, first and second driving piezoelectric elements arranged only on one surface of the trunk with a gap therebetween in an extending direction of the arms, and angular velocity detecting piezoelectric elements arranged on surfaces of the arms in parallel with the one surface of the trunk on which the first and second piezoelectric elements are arranged.

Abstract: An angular velocity sensor comprises a driving element, a detecting element, and a feedback element, all of which are disposed on an element forming face of an oscillator. An electrostatic capacitance of the feedback element is set to be equal to that of the detecting element. As a result, a synchronous detection circuit can reduce the offset signal due to a phase difference between signals from the feedback element and the detecting element.

Abstract: A plasma etching method, which can form concave parts and/or opening parts on a substrate by performing etching at a high speed and does not damage an element part formed on the surface of the substrate, is disclosed. On a semiconductor substrate with one surface as an element part forming surface and the other surface having an insulating film thereon as an etching surface are formed concave parts and/or opening parts by means of etching by applying a high-frequency electric power to a reactive gas and generating plasma thereby. The substrate is disposed on an electrode having grounded electric potential with the insulating film positioned on the lower side and a conductive part material having grounded electric potential is disposed around the substrate.

Abstract: A plasma etching process for forming a recess or opening on a silicon substrate by generating plasma between a pair of electrodes in an anode-coupled planar-type plasma etching apparatus and etching the silicon substrate located on one of the electrodes with the plasma, an improvement residing in that an etchant is a mixed gas of sulfur hexafluoride and oxygen and an etching mask covering the substrate, except for a portion where the recess or opening is to be formed, is made of chromium or a chromium compound. Preferably the distance between the electrodes is 10 to 30 mm, the volume ratio of sulfur hexafluoride to oxygen is 90:10 to 60:40, the pressure of the etchant gas is 0.15 to 0.4 Torr (20 to 53 Pa), and the temperature of the substrate is not less than 40.degree. C.

Abstract: An angular velocity sensor which suppresses the generation of noise in a detector piezo-electric element due to vibration of a vibrator caused by expansion and contraction of a driver piezo-electric element. A driver piezo-electric element 6 is adhered to an upper part on the left-side surface of a first square pole 3 of a vibrator 1 and a driver piezo-electric element 7 is adhered to an upper part on the right-side surface of a second square pole 4. Further, a detector piezo-electric element 8 is adhered to a lower part on the front surface of the first square pole 3 of the vibrator 1 and a detector piezo-electric element 9 is adhered to a lower part on the front surface of the second square pole 4. Here, the driver piezo-electric elements 6, 7 and the detector piezo-electric elements 8, 9 are disposed so as to be deviated so that they will not overlap in the axial direction of the square poles.

Abstract: A vibration and acoustic wave detecting device employing a piezoelectric element has a construction such that a piezoelectric element comprises a first surface electrode disposed on a first surface of the piezoelectric element and having a first output terminal of the detecting device, a second surface electrode opposite to the first surface thereof, a side electrode disposed to surround a side surface of the detecting device and having portions respectively extending over the first and second surfaces, the three electrodes being disposed separately from each other, and a resistor disposed on the piezoelectric element to extend across the first surface electrode and the side electrode and to be connected therewith electrically, and the piezoelectric element further comprises a conductive member which is attached to the piezoelectric element to be in contact with the second surface electrode and the side electrode and hence to provide electrical connection between both electrodes.