Patents by Inventor Munetaka MACHIDA

Munetaka MACHIDA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MASK CONTAINER AND MASK CONTAINER STORING SYSTEM
    Publication number: 20170052460
    Abstract: According to one embodiment, a mask container includes a case that houses a pattern transfer mask, and a heater. The case supports the pattern transfer mask inside the case. The heater heats the case so that the pattern transfer mask in the case has a predetermined temperature.
    Type: Application
    Filed: October 29, 2015
    Publication date: February 23, 2017
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Eiji YONEDA, Masaru Suzuki, Hiroyuki Mizuno, Satoshi Nagai, Munetaka Machida
  • CLEANING APPARATUS OF OPTICAL APPARATUS, OPTICAL APPARATUS, AND EXPOSURE APPARATUS
    Publication number: 20160062251
    Abstract: According to one embodiment, there is provided a cleaning apparatus of an optical apparatus including a first medium spraying unit. The first medium spraying unit sprays a medium on an adhered substance adhered to an optical component. The medium is cooled to a temperature lower than a room temperature and changes a state of the adhered substance into a fragile state.
    Type: Application
    Filed: December 31, 2014
    Publication date: March 3, 2016
    Applicant: Kabushiki Kaisha Toshiba
    Inventor: Munetaka MACHIDA