Patents by Inventor Muneyuki Ishimura

Muneyuki Ishimura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cleaning method with hydrochloric acid-hydrogen peroxide mixture
    Patent number: 6214129
    Abstract: A cleaning method to inhibit the adhesion of micro particles to a member to be cleaned by decreasing an amount of generation of bubbles. In a method for cleaning a member to be cleaned by dipping the member into a cleaning bath to which a hydrochloric acid-hydrogen peroxide mixture comprising hydrochloric acid, hydrogen peroxide and water is supplied through a filter and a supplying port; the improvement is that a temperature of the hydrochloric acid, hydrogen peroxide mixture is controlled within the range of 20°to 45° C.
    Type: Grant
    Filed: October 22, 1998
    Date of Patent: April 10, 2001
    Inventors: Yasuyuki Nakaoka, Setsuo Wake, Kazuyuki Kan, Muneyuki Ishimura