Patents by Inventor Munkwon Kang

Munkwon Kang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing semiconductor devices
    Patent number: 9564343
    Abstract: A substrate having an insulating layer including an oxide is loaded into a chamber, and at least a part of the insulating layer is removed by injecting a process gas including an etching source gas into the chamber. The removal process is performed in a pulse type in which a first period and a second period are repeated a plurality of times. The etching source gas is supplied at a first flow rate during the first period and is supplied at a second flow rate less than the first flow rate during the second period. A temperature of the inside of the chamber remains at 100° C. or more during the removal process.
    Type: Grant
    Filed: January 7, 2016
    Date of Patent: February 7, 2017
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Mongsup Lee, Yoonho Son, Sang-Jun Lee, Munkwon Kang, Kyunghyun Kim, Inseak Hwang
  • Method of Manufacturing Semiconductor Devices
    Publication number: 20160307773
    Abstract: A substrate having an insulating layer including an oxide is loaded into a chamber, and at least a part of the insulating layer is removed by injecting a process gas including an etching source gas into the chamber. The removal process is performed in a pulse type in which a first period and a second period are repeated a plurality of times. The etching source gas is supplied at a first flow rate during the first period and is supplied at a second flow rate less than the first flow rate during the second period. A temperature of the inside of the chamber remains at 100° C. or more during the removal process.
    Type: Application
    Filed: January 7, 2016
    Publication date: October 20, 2016
    Inventors: Mongsup Lee, Yoonho Son, Sang-Jun Lee, Munkwon Kang, Kyunghyun Kim, Inseak Hwang