Abstract: An integrated circuit includes an upper semiconductor body extending in a first direction from an upper source region to an upper drain region, and a lower semiconductor body extending in the first direction from a lower source region to a lower drain region. The upper body is spaced vertically from the lower body in a second direction orthogonal to the first direction. A gate spacer structure is adjacent to the upper and lower source regions. In an example, the gate spacer structure includes (i) a first section having a first dimension in the first direction, and (ii) a second section having a second dimension in the first direction. In an example, the first dimension is different from the second dimension by at least 1 nm. In some cases, an intermediate portion of the gate spacer structure extends laterally within a given gate structure, or between upper and lower gate structures.

Abstract: Techniques are provided herein to form non-planar semiconductor devices in a stacked transistor configuration adjacent to stressor materials. In one example, an n-channel device and a p-channel device may both be gate-all-around transistors each having any number of nanoribbons extending in the same direction, where the n-channel device is located vertically above the p-channel device (or vice versa). Source or drain regions are adjacent to both ends of the n-channel device and both ends of the p-channel device. On the opposite side of the stacked source or drain regions (e.g., opposite from the nanoribbons), stressor materials may be used to fill the gate trench in place of additional semiconductor devices. The stressor materials may include, for instance, a compressive stressor material adjacent to the p-channel device and/or a tensile stressor material adjacent to the n-channel device. The stressor material(s) may form or otherwise be part of a diffusion cut structure.

Abstract: An integrated circuit structure includes a device layer including an upper device above a lower device. The upper device includes an upper source or drain region, and an upper source or drain contact coupled to the upper source or drain region. The lower device includes a lower source or drain region. A first conductive feature is below the device layer, where the first conductive feature is coupled to the lower source or drain region. A second conductive feature vertically extends through the device layer. In an example, the second conductive feature is to couple (i) the first conductive feature below the device layer and (ii) an interconnect structure above the device layer. Thus, the first and second conductive features facilitate a connection between the interconnect structure on the frontside of the integrated circuit and the lower source or drain region towards the backside of the integrated circuit.

Abstract: An integrated circuit structure includes a second device stacked vertically above a first device. The first device includes (i) a first source or drain region, (ii) a first source or drain contact coupled to the first source or drain region, and (iii) a first layer comprising a first metal and first one or more semiconductor materials between at least a section of the first source or drain region and the first source or drain contact. The second device includes (i) a second source or drain region, (ii) a second source or drain contact coupled to the second source or drain region, and (iii) a second layer comprising a second metal and second one or more semiconductor materials between at least a section of the second source or drain region and the second source or drain contact. In an example, the first metal and the second metal are different.

Abstract: An integrated circuit structure includes a device including a source region, a drain region, a body laterally between the source and drain regions, and a source contact coupled to the source region. In an example, the source region includes a first region, and a second region compositionally different from and above the first region. The source contact extends through the second region and extends within the first region. In an example where the device is a p-channel metal-oxide-semiconductor (PMOS) device, a concentration of germanium within the second region is different (e.g., higher) than a concentration of germanium within the first region. In another example where the device is a n-channel metal-oxide-semiconductor (NMOS) device, a doping concentration level of a dopant (e.g., an n-type dopant) within the second region is different (e.g., higher) from a doping concentration level of the dopant within the first region.

Abstract: A semiconductor structure includes an upper device stacked over a lower device. In an example, the upper device includes (i) a first source region, (ii) a first drain region, (iii) a body of semiconductor material extending laterally from the first source region to the first drain region, and (iv) a first gate structure at least in part wrapped around the body. In an example, the lower device includes (i) a second source region, (ii) a second drain region, and (iii) a second gate structure at least in part laterally between the second source region and the second drain region. In an example, the lower device lacks a body of semiconductor material extending laterally from the second source region to the second drain region. In another example, the upper device lacks a body of semiconductor material extending laterally from the first source region to the first drain region.

Abstract: A semiconductor structure includes a second device stacked over a first device. In an example, the first device includes (i) a first source region, (ii) a first drain region, (iii) a body including a semiconductor material extending laterally from the first source region to the first drain region, and (iv) a first gate structure at least in part wrapped around the body. The body can be, for instance, a nanoribbon, nanosheet, or nanowire. In an example, the second device comprises (i) a second source region, (ii) a second drain region, and (iii) a second gate structure at least in part laterally between the second source region and the second drain region. In an example, the second device lacks a continuous body extending laterally from the second source region to the second drain region.