Abstract: A method for tracking the ON/OFF state of a 2D MEMS optical switch is based on comparing the output property of a magnetic sensor deployed on a micro machined optical element with fixed values predetermined by the property the sensor when said element is known to be in the ON and OFF states.

Abstract: A property of a magnetic sensor, deployed on a micro machined optical element and exposed to a magnetic field, changes as the position of the micro machined optical element changes with respect to a magnetic field or, alternatively, when the magnetic field changes with respect to the micro machined optical element. The electrical, optical and/or mechanical change in sensor property varies according to the position, and a measurement of the property change tracks the change in orientation of a moveable portion of the optical element.

Abstract: An optical switch includes a plurality of micro machined optical elements and at least one magnetic sensor disposed on a moveable portion of one or more of the micro machined optical elements in the plurality to generate a signal for tracking the orientation of the movable portion of the micro machined optical element. The switch may provides ON/OFF state tracking in a 2D planar matrix configuration or track the angular position of the movable element in a 3D beam steering configuration.

Abstract: An apparatus having magnetic detection sensor deployed on a micro machined optical element is exposed to a magnetic field to sense change in property as the micro machined optical element is manipulated with respect to the magnetic field, and, conversely when the magnetic field is manipulated with respect to the micro machined optical element. The electrical, optical and/or mechanical change in sensor property varies according to said manipulation, and telemetry created by said property change tracks the manipulation of the moveable portion of the optical element. The system includes a configuration capable of compensating for temperature variation.

Abstract: A microelectromechanical (MEMS) apparatus has a base and a flap with a portion coupled to the base so that the flap may move out of the plane of the base between first and second position. The base may have a cavity with largely vertical sidewalls that contact a portion of the flap when the flap is in the second position Electrodes may be placed on the vertical sidewalls and electrically isolated from the base to provide electrostatic clamping of the flap to the sidewall. The base may be made from a substrate portion of a silicon-on-insulator (SOI) wafer and the flap defined from a device layer of the SOI wafer. The flap may be connected to the base by one or more flexures such as torsional beams. An array of one or more of such structures may be used to form an optical switch.

Abstract: A high sensitivity torque and force cantilever magnetometer has a cantilever with isolated capacitance detection and nulling circuits which provides increased sensitivity and accuracy to measurements of a magnetic moment of a sample placed on the cantilever and exposed to a magnetic field. Magnetic detection is by electrical capacitance between a metallized plate and the cantilever. The cantilever can be used to measure both isotropic and anisotropic magnetism. The cantilever is constructed of multiple layers of conducting and insulating materials to eliminate leakage current. The magnetometer measures the magnitude of a current through a null detection circuit having at least one nulling loop deposited on the cantilever required to maintain a constant capacitance between the cantilever and a metallized plate to determine the magnetization of the sample. The null detection circuit eliminates capacitance drift and improves the accuracy of the magnetometer.

Abstract: A high sensitivity torque and force cantilever magnetometer having a cantilever with isolated capacitance detection and nulling circuits which provides increased sensitivity and accuracy to measurements of a magnetic moment of a sample placed on the cantilever and exposed to a magnetic field. Magnetic detection is by electrical capacitance between a metallized plate and the cantilever. Alternatively, magnetic detection is by electrical resistance of a piezoactive circuit deposited on the surface of the cantilever. The cantilever can be used to measure both isotropic and anisotropic magnetism and is capable of simultaneously measuring the electrical conductivity of the sample using an integrated electrically isolated circuit. The cantilever is constructed of multiple layers of conducting and insulating materials to eliminate leakage current.

Abstract: A high sensitivity torque and force cantilever magnetometer having a cantilever with isolated capacitance detection and nulling circuits which provides increased sensitivity and accuracy to measurements of a magnetic moment of a sample placed on the cantilever and exposed to a magnetic field. Magnetic detection is by electrical capacitance between a metallized plate and the cantilever. Alternatively, magnetic detection is by electrical resistance of a piezoactive circuit deposited on the surface of the cantilever. The cantilever can be used to measure both isotropic and anisotropic magnetism and is capable of simultaneously measuring the electrical conductivity of the sample using an integrated electrically isolated circuit. The cantilever is constructed of multiple layers of conducting and insulating materials to eliminate leakage current.