Patents by Inventor Murray Sirkis

Murray Sirkis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for determination and control of plasma state
    Patent number: 6713969
    Abstract: A plasma processing system that includes a plasma chamber, an open resonator movably mounted within the plasma chamber, and a detector. The open resonator produces a microwave signal, and the detector detects the microwave signal and measures a mean electron plasma density along a path of the signal within a plasma field. Alternatively, the plasma processing system includes a plasma chamber, a plurality of open resonators provided within the plasma chamber, a plurality of detectors, and a processor. The processor is configured to receive a plurality of mean electron plasma density measurements from the detectors that correspond to locations of the plurality of open resonators.
    Type: Grant
    Filed: January 31, 2003
    Date of Patent: March 30, 2004
    Assignee: Tokyo Electron Limited
    Inventors: Murray Sirkis, Wayne L. Johnson, Andrej Mitrovic, Eric J. Strang
  • Method and apparatus for determination and control of plasma state
    Publication number: 20030141822
    Abstract: A plasma processing system that includes a plasma chamber, an open resonator movably mounted within the plasma chamber, and a detector. The open resonator produces a microwave signal, and the detector detects the microwave signal and measures a mean electron plasma density along a path of the signal within a plasma field. Alternatively, the plasma processing system includes a plasma chamber, a plurality of open resonators provided within the plasma chamber, a plurality of detectors, and a processor. The processor is configured to receive a plurality of mean electron plasma density measurements from the detectors that correspond to locations of the plurality of open resonators.
    Type: Application
    Filed: January 31, 2003
    Publication date: July 31, 2003
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Murray Sirkis, Wayne L. Johnson, Andrej Mitrovic, Eric J. Strang