Patents by Inventor Murshed Mahmud Chowdhury

Murshed Mahmud Chowdhury has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming transistor contacts
    Patent number: 9171758
    Abstract: Embodiments of the present invention provide an improved method for forming transistor contacts. A sacrificial layer is deposited in a first set of contact cavities, and a capping layer is formed on the sacrificial layer. This protects the first set of contact cavities during formation of a second set of contact cavities. The sacrificial layer is then removed, and the first and second sets of contact cavities are filled with a conductive material.
    Type: Grant
    Filed: March 31, 2014
    Date of Patent: October 27, 2015
    Assignee: International Business Machines Corporation
    Inventors: Murshed Mahmud Chowdhury, Woo-Hyeong Lee, Aimin Xing
  • METHOD OF FORMING TRANSISTOR CONTACTS
    Publication number: 20150279734
    Abstract: Embodiments of the present invention provide an improved method for forming transistor contacts. A sacrificial layer is deposited in a first set of contact cavities, and a capping layer is formed on the sacrificial layer. This protects the first set of contact cavities during formation of a second set of contact cavities. The sacrificial layer is then removed, and the first and second sets of contact cavities are filled with a conductive material.
    Type: Application
    Filed: March 31, 2014
    Publication date: October 1, 2015
    Applicant: International Business Machines Corporation
    Inventors: Murshed Mahmud Chowdhury, Woo-Hyeong Lee, Aimin Xing