Abstract: A multi-layered piezoelectric device includes a plurality of piezoelectric portions and a plurality of electrodes electrically connected to the piezoelectric portions, that are formed in layers on a ceramic substrate. A first piezoelectric portion is made of a piezoelectric ceramic composition containing Ni in an amount of 0.08 to 0.31% by mass (in terms of NiO), and second and upper piezoelectric portions are made of a piezoelectric ceramic composition of higher Ni content than in the first piezoelectric portion. An electrode is provided at least between the first piezoelectric portion and the second piezoelectric portion.

Abstract: There is disclosed a piezoelectric/electrostrictive device made of piezoelectric/electrostrictive film which includes: a substrate section; and an operation section disposed on the substrate section and constituted of a piezoelectric/electrostrictive film and an electrode film and which operates by displacement of the operation section. The operation section comprises the piezoelectric/electrostrictive films and electrode films alternately laminated so that uppermost and lowermost layers form the electrode films, the operation and substrate sections are integrally fired, and the substrate section is constituted of a ceramic which contains a titanium element. For the piezoelectric/electrostrictive device made of piezoelectric/electrostrictive film, a residual stress after firing hardly exists, therefore larger displacement is obtained with the same driving voltage, response speed is higher, and generation force is larger.

Abstract: A piezoelectric/electrostrictive film-type actuator has a ceramic base and a piezoelectric/electrostrictive element, which has piezoelectric/electrostrictive films and electrode films and which is disposed on the ceramic base, and is driven in accordance with a dislocation of the piezoelectric/electrostrictive element. The piezoelectric/electrostrictive element is formed such that the piezoelectric/electrostrictive films and the electrode films are alternately laminated so as to construct the uppermost layer and the lowermost layer with the electrode films. Also, the piezoelectric/electrostrictive films have two layers and no pores, containing a different phase formed by a decomposed material thereof, in the boundary sandwiched therebetween. In addition, the upper layer of the two-layered piezoelectric/electrostrictive films is thicker than the lower layer.

Abstract: A method for producing a piezoelectric element by superposing a piezoelectric material made of a piezoelectric ceramic composition containing a PbMg1/3Nb2/3O3—PbZrO3—PbTiO3 ternary system solid solution composition represented by the general formula Pbx(Mgy/3Nb2/3)aTibZrcO3 as a main component, and 0.05 to 10.0 mass % of NiO on a ceramic substrate or on an electrode formed on the ceramic substrate, and subjecting the superposed piezoelectric material to a thermal treatment in an atmosphere where 0.03-0.5 mg/cm3 (NiO conversion amount per unit volume of a space in a container) of an atmosphere-controlling material having the same composition as the piezoelectric material is coexisted.

Abstract: A piezoelectric/electrostrictive film-type actuator has a ceramic base and a piezoelectric/electrostrictive element, which has piezoelectric/electrostrictive films and electrode films and which is disposed on the ceramic base, and is driven in accordance with a dislocation of the piezoelectric/electrostrictive element. The piezoelectric/electrostrictive element is formed such that the piezoelectric/electrostrictive films and the electrode films are alternately laminated so as to construct the uppermost layer and the lowermost layer with the electrode films. Also, the piezoelectric/electrostrictive films have two layers and no pores, containing a different phase formed by a decomposed material thereof, in the boundary sandwiched therebetween. In addition, the upper layer of the two-layered piezoelectric/electrostrictive films is thicker than the lower layer.

Abstract: A piezoelectric element includes a ceramic substrate, a piezoelectric portion made of a piezoelectric ceramic composition containing a PbMg1/3Nb2/3O3—PbZrO3—PbTiO3 ternary system solid solution composition having an average particle diameter of 1-10 &mgr;m with a maximum particle diameter being not more than 5 times as large as the average particle diameter including the chemical formula discussed below as a main component and the piezoelectric and the piezoelectric ceramic composition includes 0.05 to 10.0 mass % of NiO. An electrode is electrically connected to the piezoelectric portion, and the piezoelectric portion is solidly attached to the ceramic substrate directly or via the electrode. The piezoelectric ceramic composition is represented by the following general formula: Pbx(Mgy/3Nb2/3)aTibZrcO3, wherein 0.95≦x≦1.05; 0.8≦y≦1.0; a, b and c are decimals falling in a range surrounded by (a,b,c)=(0.550, 0.425, 0.025), (0.550, 0.325, 0.125), (0.375, 0.325, 0.300), (0.100, 0.

Abstract: A piezoelectric element includes: a ceramic substrate, an electrode and a piezoelectric portion made of a piezoelectric ceramic composition containing a Pb(Mg, Ni)1/3Nb2/3O3—PbZrO3—PbTiO3 ternary system solid solution composition being represented by the following general formula (1) as a main component: Pbx{(Mg1−yNiy)1/3×aNb2/3}bTicZrdO3 (1), wherein 0.95≦x≦1.05; 0.05≦y≦0.20; 0.90≦a≦1.10; b,c, and d are decimals falling in a range surrounded by (b, c, d)=(0.550, 0.425, 0.025), (0.550, 0.325, 0.125), (0.375, 0.325, 0.300), (0.100, 0.425, 0.475), (0.100, 0.475, 0.425) and (0.375, 0.425, 0.200) in the coordinates with coordinate axes of said b, c and d, and b+c+d=1.000. The electrode is electrically connected to the piezoelectric portion, and the piezoelectric portion is solidly attached to the ceramic substrate directly or via the electrode.

Abstract: A multi-layered piezoelectric device has, on a ceramic-made substrate, a plurality of piezoelectric portions and a plurality of electrodes electrically connected to the piezoelectric portions, in layers, wherein a first piezoelectric portion is made of a piezoelectric ceramic composition containing Ni in an amount of 0.08 to 0.31% by mass (in terms of NiO), second and upper piezoelectric portions are made of a piezoelectric ceramic composition of higher Ni content than in the first piezoelectric portion, and an electrode is provided at least between the first piezoelectric portion and the second piezoelectric portion. This multi-layered piezoelectric device has a very high piezoelectric characteristic, is superior in transmission of oscillation between ceramic substrate and piezoelectric portions, and can be suitably used in actuators, sensors, etc.

Abstract: There is disclosed a piezoelectric/electrostrictive film type actuator (11) which comprises a ceramic substrate (44), and a piezoelectric/electrostrictive device (78) disposed on the ceramic substrate (44) and being provide with a piezoelectric/electrostrictive film (79) and electrode film (73, 75, 77); the device being driven by displacement of the piezoelectric/electrostrictive device (78); and the piezoelectric/electrostrictive device (78) wherein the piezoelectric/electrostrictive film (79) and electrode film (73, 75, 77) are alternately laminated to form the electrode from a uppermost layer and a lowermost layer possesses a plurality of layers of piezoelectric/electrostrictive films (79). The piezoelectric/electrostrictive film type actuator is superior in that it can easily highly be integrated without including a structure laminated using an adhesive, and attain a larger displacement with the same driving voltage, a fast response speed and a large generation force.

Abstract: A piezoelectric/electrostrictive film-type actuator has a ceramic base and a piezoelectric/electrostrictive element, which has piezoelectric/electrostrictive films and electrode films and which is disposed on the ceramic base, and is driven in accordance with a dislocation of the piezoelectric/electrostrictive element. The piezoelectric/electrostrictive element is formed such that the piezoelectric/electrostrictive films and the electrode films are alternately laminated so as to construct the uppermost layer and the lowermost layer with the electrode films. Also, the piezoelectric/electrostrictive films have two layers and no pores, containing a different phase formed by a decomposed material thereof, in the boundary sandwiched therebetween. In addition, the upper layer of the two-layered piezoelectric/electrostrictive films is thicker than the lower layer.

Abstract: A piezoelectric element includes: a ceramic substrate, an electrode, and a piezoelectric portion made of a piezoelectric ceramic composition containing a Pb(Mg, Ni)1/3Nb2/3O3—PbZrO3—PbTiO3 ternary system solid solution composition being represented by the following general formula (1) as a main component:

Abstract: A piezoelectric element includes: a ceramic substrate, an electrode and a piezoelectric portion made of a piezoelectric ceramic composition containing a Pb(Mg, Ni)1/3Nb2/3O3—PbZrO3—PbTiO3 ternary system solid solution composition being represented by the following general formula (1) as a main component: Pbx{(Mg1-yNiy)1/3xaNb2/3}bTicZrdO3(1), wherein 0.95≦x≦1.05; 0.05≦y≦0.20; 0.90≦a≦1.10; b,c, and d are decimals falling in a range surrounded by (b, c, d)=(0.550, 0.425, 0.025), (0.550, 0.325, 0.125), (0.375, 0.325, 0.300), (0.100, 0.425, 0.475), (0.100, 0.475, 0.425) and (0.375, 0.425, 0.200) in the coordinates with coordinate axes of said b, c and d, and b+c+d=1.000. The electrode is electrically connected to the piezoelectric portion, and the piezoelectric portion is solidly attached to the ceramic substrate directly or via the electrode.

Abstract: A piezoelectric element includes: a ceramic substrate, a piezoelectric portion made of a piezoelectric ceramic composition containing a Pb(Mg, Ni)⅓Nb⅔O3—PbZrO3—PbTiO3 ternary system solid solution composition being represented by the following general formula (1) as a main, and an electrode. The electrode is electrically connected to the piezoelectric portion, and the piezoelectric portion is solidly attached to the ceramic substrate directly or via the electrode.

Abstract: A piezoelectric element comprising: a ceramic substrate, a piezoelectric portion made of a piezoelectric ceramic composition containing a PbMg1/3Nb2/3O—PbZrO3—PbTiO3 ternary system solid solution composition having an average particle diameter of 1-10 &mgr;m with a maximum particle diameter being 5 times as large as the average particle diameter or less and being represented by the following general formula (1) as a main component and 0.05 to 10.0 mass % of NiO, and an electrode. The electrode is electrically connected to the piezoelectric portion, and the piezoelectric portion is solidly attached to the ceramic substrate directly or via the electrode.

Abstract: A lower electrode 4 of a substrate 1 is continuously formed from a thin diaphragm portion 3 to a thick region 2, and independently of the lower electrode 4, an auxiliary electrode 8 is formed on the thick region 2 of the substrate 1, whereby a piezoelectric/electrostrictive film 5 is formed across the lower electrode 4 and the auxiliary electrode 8. An incomplete bonding portion of the piezoelectric/electrostrictive film 5 to the substrate 1 is eliminated on the thin diaphragm portion 3, thereby making it possible to reduce significantly a variation in vibration form.

Abstract: A lower electrode 4 of a substrate 1 is continuously formed from a thin diaphragm portion 3 to a thick region 2, and independently of the lower electrode 4, an auxiliary electrode 8 is formed on the thick region 2 of the substrate 1, whereby a piezoelectric/electrostrictive film 5 is formed across the lower electrode 4 and the auxiliary electrode 8. An incomplete bonding portion of the piezoelectric/electrostrictive film 5 to the substrate 1 is eliminated on the thin diaphragm portion 3, thereby making it possible to reduce significantly a variation in vibration form.