Abstract: A tool is equipped with a torque sensor, suited for a tightening task of a fastening component of a device such as a fluid control system that requires a large number of fastening components for assembly and has a narrow space for access to the fastening components, and capable of automatically detecting a tightening torque. The tool includes a torque sensor capable of detecting a tightening torque for tightening a fastening component acting on a bit. The torque sensor initiates measurement of the tightening torque when the tightening torque detected exceeds a set threshold value, completes measurement when the tightening torque detected falls below the set threshold value and a set time elapses, and outputs torque-related data formed on the basis of measurement data from measurement initiation to measurement completion and including a measurement time. The torque-related data includes a peak value of the measurement data.

Abstract: A tool is equipped with a torque sensor, suited for a tightening task of a fastening component of a device such as a fluid control system that requires a large number of fastening components for assembly and has a narrow space for access to the fastening components, and capable of automatically detecting a tightening torque. The tool includes a torque sensor capable of detecting a tightening torque for tightening a fastening component acting on a bit. The torque sensor initiates measurement of the tightening torque when the tightening torque detected exceeds a set threshold value, completes measurement when the tightening torque detected falls below the set threshold value and a set time elapses, and outputs torque-related data formed on the basis of measurement data from measurement initiation to measurement completion and including a measurement time. The torque-related data includes a peak value of the measurement data.

Abstract: A fluid control apparatus has a reduced number of components and enables simple alteration such as increasing or decreasing the number of lines. Chanel blocks on a lower stage include a plural-line (three-line) passage block disposed over a plurality of lines. The plural-line passage block receives an upper stage over three lines, with each of the lines including an inlet extension of a flow rate controller, and two inlet-side on-off valves arranged in series with the inlet extension. The plural-line passage block has longitudinal passages and transverse passages therein. The longitudinal passages are in communication with passages of the fluid control devices arranged in series per line. The transverse passages are in communication with passages of fluid control devices arranged in adjacent lines.

Abstract: A plurality of stacked and fixed gas supplying units U, each gas supplying unit U having at least four gas supply lines S is formed by opposingly combining and fixing two flow controllers 3, each flow controller 3 provided with a plurality of flow control units, to a gas inlet-side block 12 and a gas outlet-side block 13 that are disposed in parallel across an interval in plan view and providing each flow controller 3 with an inlet opening and closing valve 1 and an outlet opening and closing valve 5.

Abstract: To provide a check valve which can be used even under a high temperature condition by overcoming a drawback “valve element sticking to sealing member” associated with high temperature use while enhancing heat resistance. An opening of a fluid path formed in a first body is brought into a closed state by bringing a valve element biased by a biasing member into contact with a sealing member. The sealing member is formed of a post-cured perfluoro elastomer packing. An annular sealing portion which is brought into line contact with the sealing member is formed on the valve element.

Abstract: A fluid control device includes two opening and closing valves 2, 3 disposed symmetrical to each other and having an identical shape, two fluid discharge passages 6, 7, 11, 12 having an equal length and provided in parallel with each other in outlets of the opening and closing valves 2, 3, and a connection member 10 attachable to a chamber and having two fluid passages 25, 26 formed in an equal length to and communicating with the two fluid discharge passages 6, 7, 11, 12, the connection member being provided in outlets of the two fluid discharge passages 6, 7, 11, 12.

Abstract: Provided is a diaphragm valve that can improve durability when the diaphragm valve is downsized. In a pressing adaptor, a whole lower surface thereof has a taper shape at a predetermined inclination angle. A bottom surface of a depression of a body has a circular flat portion and a depression that is continued to an outer circumference of the flat portion and is depressed with respect to the flat portion. In a diaphragm, in a state where a fluid inflow channel is opened, an upper surface of an outer circumferential edge portion comes into surface contact with the taper-shaped lower surface a of the pressing adaptor, and a lower surface of the outer circumferential edge portion comes into line contact with the outer circumference of the flat portion of the bottom surface of the depression of the body.

Abstract: To provide a fluid control apparatus capable of reducing the space, while reducing the cost. A fluid control apparatus has a fluid controlling unit and a fluid introducing unit. The fluid introducing unit is divided into three parts: a first and a second inlet-side shutoff/open parts disposed on the inlet side, each made up of 2×N/2, disposed between the first and second inlet-side shutoff/open parts and the fluid controlling unit.

Abstract: A purge line changing block joint for enabling supply of different types of purge gas between lines without a significant remodeling of a fluid control apparatus and the fluid control apparatus is provided. A purge line changing block joint is connected to an upper side of a three-way valve channel portion in at least one line of the plurality of lines. The purge line changing block joint includes a process gas inlet channel communicating with a process gas inlet channel of the three-way valve channel portion, an outlet channel communicating the process gas inlet channel and an outlet channel of the three-way valve channel portion, a channel terminal not in communication with a purge gas inlet channel of the three-way valve channel portion but terminating the same, and a new purge gas inlet channel communicating with the outlet channel and opening on the top surface.

Abstract: A plurality of stacked and fixed gas supplying units U, each gas supplying unit U having at least four gas supply lines S is formed by opposingly combining and fixing two flow controllers 3, each flow controller 3 provided with a plurality of flow control units, to a gas inlet-side block 12 and a gas outlet-side block 13 that are disposed in parallel across an interval in plan view and providing each flow controller 3 with an inlet opening and closing valve 1 and an outlet opening and closing valve 5.

Abstract: A purge line changing block joint for enabling supply of different types of purge gas between lines without a significant remodeling of a fluid control apparatus and the fluid control apparatus is provided. A purge line changing block joint is connected to an upper side of a three-way valve channel portion in at least one line of the plurality of lines. The purge line changing block joint includes a process gas inlet channel communicating with a process gas inlet channel of the three-way valve channel portion, an outlet channel communicating the process gas inlet channel and an outlet channel of the three-way valve channel portion, a channel terminal not in communication with a purge gas inlet channel of the three-way valve channel portion but terminating the same, and a new purge gas inlet channel communicating with the outlet channel and opening on the top surface.

Abstract: A fluid control apparatus has a reduced number of components and enables simple alteration such as increasing or decreasing the number of lines. Channel blocks on a lower stage include a plural-line (three-line) passage block 21 disposed over a plurality of lines. The plural-line passage block 21 receives an upper stage over three lines, with each of the lines including an inlet extension 16b of a flow rate controller 16, and two inlet-side on-off valves 14, 15 arranged in series with the inlet extension 16b. The plural-line passage block 21 has longitudinal passages and transverse passages therein. The longitudinal passages are in communication with passages of the fluid control devices arranged in series per line. The transverse passages are in communication with passages of fluid control devices arranged in adjacent lines.

Abstract: To provide a check valve which can be used even under a high temperature condition by overcoming a drawback “valve element sticking to sealing member” associated with high temperature use while enhancing heat resistance. An opening of a fluid path formed in a first body is brought into a closed state by bringing a valve element biased by a biasing member into contact with a sealing member. The sealing member is formed of a post-cured perfluoro elastomer packing. An annular sealing portion which is brought into line contact with the sealing member is formed on the valve element.

Abstract: Provided is a diaphragm valve that can improve durability when the diaphragm valve is downsized. In a pressing adaptor, a whole lower surface thereof has a taper shape at a predetermined inclination angle. A bottom surface of a depression of a body has a circular flat portion and a depression that is continued to an outer circumference of the flat portion and is depressed with respect to the flat portion. In a diaphragm, in a state where a fluid inflow channel is opened, an upper surface of an outer circumferential edge portion comes into surface contact with the taper-shaped lower surface of the pressing adaptor, and a lower surface of the outer circumferential edge portion comes into line contact with the outer circumference of the flat portion of the bottom surface of the depression of the body.

Abstract: A fluid control device includes two opening and closing valves 2, 3 disposed symmetrical to each other and having an identical shape, two fluid discharge passages 6, 7, 11, 12 having an equal length and provided in parallel with each other in outlets of the opening and closing valves 2, 3, and a connection member 10 attachable to a chamber and having two fluid passages 25, 26 formed in an equal length to and communicating with the two fluid discharge passages 6, 7, 11, 12, the connection member being provided in outlets of the two fluid discharge passages 6, 7, 11, 12.

Abstract: There is provided a fluid controller having an enhanced vibration preventing characteristic without affecting pressure controlling operations. A valve element 4 is moved with respect to a valve seat 3 due to a change of balance between a fluid pressure acting on a diaphragm 10 and an elastic force of a pressure-setting spring 13, thereby controlling a pressure of a fluid. A vibration prevention member 17 is placed in a disk-shaped movable member 12 which moves integrally with the diaphragm 10. The vibration prevention member 17 includes a casing which incorporates therein a weight member interposed between elastic members.

Abstract: The present invention provides a joint member which suppresses the increase of the number of members and enables the provision of a further compactified integrated fluid control apparatus. A sensor-equipped joint member 10 includes a channel block 41 including a V-shaped channel 41a formed therein for communicating adjacent fluid control devices 16 and 20 to each other at their lower-end openings, and a pressure sensor 42 provided on a side surface of the channel block 41. The channel block 41 is provided with a branched channel 41b which is branched from the V-shaped channel 41a and is communicated to the pressure sensor 42.

Abstract: A pressure sensor apparatus which can provide an integrated fluid control apparatus in which a pressure sensor is easily replaced independently, as well as achieving a more compact structure, and a pressure sensor built-in fluid control equipment. A pressure sensor apparatus (21) includes a first passage block (22) in which a predetermined passage (22a) is formed, a second passage block (23) in which a predetermined passage (23a) is formed and which opposes to the first passage block (22) at a predetermined interval, and a pressure sensor (24) which is provided in an opposing surface of any one of the first and second passage blocks (23) and detects a fluid pressure in an inner passage (23b), and is integrated in a pressure regulator (16).

Abstract: There is provided a fluid controller having an enhanced vibration preventing characteristic without affecting pressure controlling operations. A valve element 4 is moved with respect to a valve seat 3 due to a change of balance between a fluid pressure acting on a diaphragm 10 and an elastic force of a pressure-setting spring 13, thereby controlling a pressure of a fluid. A vibration prevention member 17 is placed in a disk-shaped movable member 12 which moves integrally with the diaphragm 10. The vibration prevention member 17 includes a casing which incorporates therein a weight member interposed between elastic members.

Abstract: There is provided a fluid control device having no dead volume. A fluid flow path is constituted by a loop-shaped flow-path portion L, and a first inlet flow-path portion B1, a second inlet flow-path portion B2 and a common outlet flow-path portion B3 which are communicated with a first inlet A1, a second inlet A2 and a common outlet A3 at predetermined portions P1, P2 and P3 of the loop-shaped flow-path portion L. There are provided a first shut-off valve V1 for opening and closing the first inlet flow-path portion B1 and a second shut-off valve V2 for opening and closing the second inlet flow-path portion B2.