Abstract: An apparatus for producing a purified aqueous hydrogen peroxide solution. The apparatus includes at least one purifier tower packed with an ion exchange resin, a chelate resin or an adsorption resin for receiving a charged aqueous hydrogen peroxide solution containing impurities so as to effect contact thereof with the ion exchange resin, chelate resin or adsorption resin, thereby purifying the charged aqueous hydrogen peroxide solution, which apparatus further comprises a feed pump of given output capable of causing the charged aqueous hydrogen peroxide solution to flow to the purifier tower, a flow sensor capable of sensing a flow rate of charged aqueous hydrogen peroxide solution being fed to the purifier tower by means of the feed pump, and a flow control unit capable of controlling the output of the feed pump on the basis of a detection result of the flow sensor so as to maintain the flow of charged aqueous hydrogen peroxide solution being fed to the purifier tower at a constant rate.

Abstract: A method of regenerating an ion exchange resin, comprising the steps of packing a used ion exchange resin in a regeneration tower; and repeating at least twice a step comprising passing an aqueous solution of regenerant through the regeneration tower downward from a top part of the regeneration tower and thereafter passing ultra-pure water through the regeneration tower upward from a bottom of the regeneration tower. This method enables regenerating an ion exchange resin efficiently and homogeneously without mixing of the regenerant into ion exchange resin towers for purification.

Abstract: An apparatus for producing a purified aqueous hydrogen peroxide solution. The apparatus includes at least one purifier tower packed with an ion exchange resin, a chelate resin or an adsorption resin for receiving a charged aqueous hydrogen peroxide solution containing impurities so as to effect contact thereof with the ion exchange resin, chelate resin or adsorption resin, thereby purifying the charged aqueous hydrogen peroxide solution, which apparatus further comprises a feed pump of given output capable of causing the charged aqueous hydrogen peroxide solution to flow to the purifier tower, a flow sensor capable of sensing a flow rate of charged aqueous hydrogen peroxide solution being fed to the purifier tower by means of the feed pump, and a flow control unit capable of controlling the output of the feed pump on the basis of a detection result of the flow sensor so as to maintain the flow of charged aqueous hydrogen peroxide solution being fed to the purifier tower at a constant rate.

Abstract: A process for producing a purified aqueous hydrogen peroxide solution, comprising passing a charged aqueous hydrogen peroxide solution containing impurities through a purifier tower packed with an ion exchange resin, a chelate resin or an adsorption resin to thereby purify the charged aqueous hydrogen peroxide solution, wherein there are provided a feed pump of given output capable of causing the charged aqueous hydrogen peroxide solution to flow to the purifier tower and further a flow sensor capable of sensing a flow rate of charged aqueous hydrogen peroxide solution being fed to the purifier tower and wherein the output of the feed pump is controlled in cooperation with the flow sensor so as to bring the charged aqueous hydrogen peroxide solution into contact with the ion exchange resin, chelate resin or adsorption resin while maintaining the flow of charged aqueous hydrogen peroxide solution at a constant rate.

Abstract: A method of regenerating an ion exchange resin, comprising the steps of packing a used ion exchange resin in a regeneration tower; and repeating at least twice a step comprising passing an aqueous solution of regenerant through the regeneration tower downward from a top part of the regeneration tower and thereafter passing ultra-pure water through the regeneration tower upward from a bottom of the regeneration tower. This method enables regenerating an ion exchange resin efficiently and homogeneously without mixing of the regenerant into ion exchange resin towers for purification.

Abstract: A process for producing a purified aqueous hydrogen peroxide solution, comprising passing a charged aqueous hydrogen peroxide solution containing impurities through a purifier tower packed with an ion exchange resin, a chelate resin or an adsorption resin to thereby purify the charged aqueous hydrogen peroxide solution, wherein there are provided a feed pump of given output capable of causing the charged aqueous hydrogen peroxide solution to flow to the purifier tower and further a flow sensor capable of sensing a flow rate of charged aqueous hydrogen peroxide solution being fed to the purifier tower and wherein the output of the feed pump is controlled in cooperation with the flow sensor so as to bring the charged aqueous hydrogen peroxide solution into contact with the ion exchange resin, chelate resin or adsorption resin while maintaining the flow of charged aqueous hydrogen peroxide solution at a constant rate.