Abstract: A container relay unit relaying containers between a transport vehicle and load ports and a logistics transport system including the container relay unit are provided. The logistics transport system includes: a container transport unit installed in a semiconductor fabrication plant, the container transport unit transporting containers loaded with semiconductor substrates; a load port unit where the containers are loaded or unloaded; semiconductor fabrication equipment connected to the load port unit, the semiconductor fabrication equipment processing the semiconductor substrates loaded in the containers; and a container relay unit relaying the containers between the container transport unit and the load port unit, wherein the container relay unit is installed on the same level as a moving path of the container transport unit, on a level above the load port unit.

Abstract: A method for manufacturing a semiconductor device is provided.

Abstract: Provided is a transferring apparatus for transferring a container in which an article is accommodated. The transferring apparatus may include a first rail, a second rail located below the first rail, and a transfer unit located on the sides of the first rail and the second rail, and configured to transfer the container between a first vehicle traveling on the first rail and a second vehicle traveling on the second rail, in which the transfer unit may include a frame having an elevation space therein, and an elevation member for elevating the container between a first position transferring the first vehicle and the container and a second position transferring the second vehicle and the container, in the elevation space.

Abstract: A method for manufacturing a semiconductor device is provided.

Abstract: A fireproof shutter includes a frame having an opening through which a transport rail for movement of a transport vehicle passes, the opening being divided into an upper opening and a lower opening based on the transport rail, an upper door mounted on the frame and configured to open and close the upper opening, and a lower door mounted on the frame and configured to open and close the lower opening.