Abstract: Provided are a silicon nitride film etching composition, a method of etching a silicon nitride film using the same, and a manufacturing method of a semiconductor device. Specifically, a silicon nitride film may be stably etched with a high selection ratio relative to a silicon oxide film, and when the composition is applied to an etching process at a high temperature and a semiconductor manufacturing process, not only no precipitate occurs but also anomalous growth in which the thickness of the silicon oxide film is rather increased does not occur, thereby minimizing defects and reliability reduction.

Abstract: Disclosed are novel compounds of Chemical Formula 1, optical isomers of the compounds, and pharmaceutically acceptable salts of the compounds or the optical isomers. The compounds, isomers, and salts exhibit excellent activity as GLP-1 receptor agonists. In particular, they, as GLP-1 receptor agonists, exhibit excellent glucose tolerance, thus having a great potential to be used as therapeutic agents for metabolic diseases. Moreover, they exhibit excellent pharmacological safety for cardiovascular systems.

Abstract: A driving safety control apparatus for a vehicle is provided. In some embodiments, the driving safety control apparatus makes use of a hybrid wheel sensor capable of automatically detecting an abnormal state of one or more chassis components generated when the vehicle is running by using speed and acceleration signals of the hybrid wheel sensor with a semiconductor acceleration sensor mounted on the wheel of the vehicle, thereby informing the driver of the detected abnormal state. In this manner, the detected abnormal part can be repaired at an early stage. Also, the behavior of the vehicle wheels can be monitored, whereby signals representative of the measured behavior can be transmitted to an active suspension for improved control of the active suspension, compared to known systems.

Abstract: An exhaust gas recirculation system. A water jacket in a cylinder block is configured for coolant to flow therein. A cylinder head is attached to the cylinder block. A cylinder is disposed in the cylinder block and the cylinder head. An intake manifold runner is connected to an intake hole of the cylinder. An exhaust manifold runner is connected to an exhaust hole of the cylinder. A first recirculation gas pathway is disposed in the cylinder block, and receives recirculated exhaust gas from the exhaust manifold runner. A second recirculation gas pathway is disposed in the cylinder head, and has a first end connected to the first recirculation gas pathway and a second end connected to the intake manifold runner. A recirculation valve, mounted at the second recirculation gas pathway, controls supply of the recirculated exhaust gas to the intake manifold runner. An engine control unit controls the recirculation valve.

Abstract: An exhaust gas recirculation system. A water jacket in a cylinder block is configured for coolant to flow therein. A cylinder head is attached to the cylinder block. A cylinder is disposed in the cylinder block and the cylinder head. An intake manifold runner is connected to an intake hole of the cylinder. An exhaust manifold runner is connected to an exhaust hole of the cylinder. A first recirculation gas pathway is disposed in the cylinder block, and receives recirculated exhaust gas from the exhaust manifold runner. A second recirculation gas pathway is disposed in the cylinder head, and has a first end connected to the first recirculation gas pathway and a second end connected to the intake manifold runner. A recirculation valve, mounted at the second recirculation gas pathway, controls supply of the recirculated exhaust gas to the intake manifold runner. An engine control unit controls the recirculation valve.