Patents by Inventor Myoung Kyu OH

Myoung Kyu OH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR FABRICATION APPARATUS AND FABRICATION METHOD
    Publication number: 20230045027
    Abstract: A semiconductor fabrication apparatus comprises a process chamber, an ozone supply that provides the process chamber with ozone, an oxygen supply that provides the ozone supply with a source gas of the ozone, and a plurality of impurity detectors disposed between the oxygen supply and the ozone supply. The impurity detectors detect an inactive gas in the source gas.
    Type: Application
    Filed: April 14, 2022
    Publication date: February 9, 2023
    Inventors: Myoung-Kyu Oh, Gyehoon Kwak, Junguk KIM, Hyeonju KIM
  • Optical fiber for chemical sensor
    Patent number: 9958603
    Abstract: An optical fiber for an optical fiber sensor and a chemical sensor using the same are disclosed. The optical fiber includes a core area, and a suspended cladding area formed around the core area and having at least one cladding hole. The core area has at least one core hole for reducing an effective refractive index of the core area. The optical fiber and the chemical sensor using the same may have improved measurement sensitivity by increasing an evanescent field fraction of existing suspended core fibers.
    Type: Grant
    Filed: July 24, 2013
    Date of Patent: May 1, 2018
    Assignee: Gwangju Institute of Science and Technology
    Inventors: Bok Hyeon Kim, Youngjoo Chung, So Eun Kim, Bongkyun Kim, Tae Joong Eom, Myoung Kyu Oh
  • OPTICAL FIBER FOR CHEMICAL SENSOR
    Publication number: 20140037261
    Abstract: An optical fiber for an optical fiber sensor and a chemical sensor using the same are disclosed. The optical fiber includes a core area, and a suspended cladding area formed around the core area and having at least one cladding hole. The core area has at least one core hole for reducing an effective refractive index of the core area. The optical fiber and the chemical sensor using the same may have improved measurement sensitivity by increasing an evanescent field fraction of existing suspended core fibers.
    Type: Application
    Filed: July 24, 2013
    Publication date: February 6, 2014
    Applicant: GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY
    Inventors: Bok Hyeon KIM, Youngjoo CHUNG, So Eun KIM, Bongkyun KIM, Tae Joong EOM, Myoung Kyu OH