Abstract: Provided is an oil-sorbent including a hydrophilic structure. The hydrophilic structure includes a plurality of macro pores. The macro pores have an average diameter of at least about 2 mm. An oil-sorbent includes a hydrophilic structure including a plurality of macro pores. The hydrophilic structure has an open-porous structure and has a porosity of at least 70%.

Abstract: The present invention relates to a silicon oxide encapsulation film comprising a metal or a metal oxide, and a manufacturing method therefor. The silicon metal oxide encapsulation film according to the present invention has a high thin film growth rate and low moisture and oxygen permeabilities, thereby exhibiting a very excellent sealing effect even at a low thickness, and the stress strength and refractive index thereof can be controlled, thereby enabling a high-quality silicon metal oxide encapsulation film that is applicable to a flexible display to be readily manufactured.

Abstract: Disclosed are a display apparatus and an image displaying method, which can increase a battery usage time. The display apparatus includes a display including a screen for displaying an image; and a controller configured to provide the display a first user interface (UI) for selecting at least one among a plurality of regions in the screen, provide the display a second UI for adjusting a displaying position of the image to be displayed on at least one region selected through the first UI, and control the display to display the image at the displaying position adjusted through the second UI, and make the other regions of the screen except the region where the image is displayed be in a power-saving mode. According to the present invention, it is possible to not only increase a battery usage time but also display information at a position desired by a user.

Abstract: Disclosed are a display apparatus and an image displaying method, which can increase a battery usage time. The display apparatus includes a display including a screen for displaying an image; and a controller configured to provide the display a first user interface (UI) for selecting at least one among a plurality of regions in the screen, provide the display a second UI for adjusting a displaying position of the image to be displayed on at least one region selected through the first UI, and control the display to display the image at the displaying position adjusted through the second UI, and make the other regions of the screen except the region where the image is displayed be in a power-saving mode. According to the present invention, it is possible to not only increase a battery usage time but also display information at a position desired by a user.

Abstract: A baffle including a base plate disposed in a central portion of a showerhead in an apparatus for processing a substrate. An extension plate is movably connected to a planar surface of the base plate. The extension plate is configured to extend and contract radially from the base plate to change a diameter of the baffle.

Abstract: A semiconductor manufacturing apparatus may include a chamber accommodating a substrate to be processed, a first electrode providing electric field in the chamber and a second electrode opposing to the first electrode, and a first power transmitting rod connected to one of the first electrode and the second electrode. A conductive stress attenuating unit may be formed in the first power transmitting rod. Methods of manufacturing semiconductor devices using the semiconductor manufacturing apparatus are also disclosed.

Abstract: A semiconductor manufacturing apparatus may include a chamber accommodating a substrate to be processed, a first electrode providing electric field in the chamber and a second electrode opposing to the first electrode, and a first power transmitting rod connected to one of the first electrode and the second electrode. A conductive stress attenuating unit may be formed in the first power transmitting rod. Methods of manufacturing semiconductor devices using the semiconductor manufacturing apparatus are also disclosed.

Abstract: An example embodiment relates to a plasma diagnostic apparatus that exists outside of a plasma generation chamber. The plasma diagnostic apparatus is configured to recognize and/or diagnose a state of plasma using a signal flowing from a floated electrode of a plasma generation apparatus to determine a diagnostic factor of the plasma.

Abstract: A semiconductor substrate processing apparatus can supply RF powers having the same frequency to upper and lower electrodes serving to generate different degrees of uniformity, and control a power ratio of the RF powers, thereby enhancing a processing uniformity of a semiconductor substrate. The apparatus includes a vacuum chamber to receive a semiconductor substrate, upper and lower electrodes disposed within the vacuum chamber, RF power suppliers to supply RF powers having the same frequency to the upper and lower electrodes, and a controller to control a power ratio of the RF powers supplied from the RF power suppliers to the upper and lower electrodes.

Abstract: An inductively-coupled antenna (ICP) in a plasma generating apparatus comprises an inner antenna segment having an annular shape and at least one outer antenna segment approximately concentrically placed outside of the inner antenna segment, and connected to the inner antenna segment in series, wherein at least one of the inner antenna segments and the outer antenna segments have a plurality of annular coils connected in parallel with each other and having a different diameter from each other. Accordingly, the present invention provides an ICP antenna and plasma generating apparatus using the same having a simple structure, a reduced inductance, and an improved uniformity of plasma density.

Abstract: An apparatus for inspecting a collimator including a pigtail formed with first and second fibers, a GRIN lens disposed coaxially relative to the pigtail, and a glass tube supporting the pigtail and the GRIN lens in a single unit, to inspect optical properties of the collimator, comprising an inspection table; a gripping part, which is provided on the inspection table, gripping the collimator subject to inspection; a light supplying part transmitting a predetermined optical signal to the first fiber; a light receiving part, which is connected to the second fiber, receiving an optical signal returned from the second fiber, entering the first fiber; a measuring part calculating a value of the predetermined optical signal, which entered the first fiber, and a value of the optical signal, which returned from the second fiber; and an image displaying part displaying the value obtained from the measuring part.

Abstract: An apparatus for inspecting a collimator including a pigtail to which a fiber is connected to transmit an optical signal, a GRIN lens coaxially arranged with the pigtail, a glass tube accommodating and supporting the pigtail and the GRIN lens, and a metal sleeve protecting the glass tube, comprising an inspection table; a grip part provided on the inspection table, and gripping the collimator to be inspected; a first camera provided over the grip part having an axis perpendicular to a length of the collimator, and photographing the collimator along the length of the collimator; a second camera arranged coaxially with the collimator on the inspection table, and photographing the collimator perpendicular to an axis of the collimator; and a displaying part connected to the first and second camera, and displaying pictures transmitted from the first and second cameras.

Abstract: An apparatus for inspecting a collimator including a pigtail formed with first and second fibers, a GRIN lens disposed coaxially relative to the pigtail, and a glass tube supporting the pigtail and the GRIN lens in a single unit, to inspect optical properties of the collimator, comprising an inspection table; a gripping part, which is provided on the inspection table, gripping the collimator subject to inspection; a light supplying part transmitting a predetermined optical signal to the first fiber; a light receiving part, which is connected to the second fiber, receiving an optical signal returned from the second fiber, entering the first fiber; a measuring part calculating a value of the predetermined optical signal, which entered the first fiber, and a value of the optical signal, which returned from the second fiber; and an image displaying part displaying the value obtained from the measuring part.

Abstract: an apparatus for inspecting a collimator including a pigtail to which a fiber is connected to transmit an optical signal, a GRIN lens coaxially arranged with the pigtail, a glass tube accommodating and supporting the pigtail and the GRIN lens, and a metal sleeve protecting the glass tube, comprising an inspection table; a grip part provided on the inspection table, and gripping the collimator to be inspected; a first camera provided over the grip part having an axis perpendicular to a length of the collimator, and photographing the collimator along the length of the collimator; a second camera arranged coaxially with the collimator on the inspection table, and photographing the collimator perpendicular to an axis of the collimator; and a displaying part connected to the first and second camera, and displaying pictures transmitted from the first and second cameras.