Patents by Inventor MYOUNGRYUL HAN

MYOUNGRYUL HAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor processing system including temperature controller
    Patent number: 12237183
    Abstract: A semiconductor processing system includes; a chamber, a substrate support disposed in the chamber, and a temperature controller including a thermal section disposed under the substrate support and a coupling section including at least one coupling section member. The thermal section includes a first plate and a second plate spaced apart under the substrate support, and each of the first plate and the second plate is coupled to a side portion of the substrate by at least one coupling section member.
    Type: Grant
    Filed: March 24, 2021
    Date of Patent: February 25, 2025
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Kyoungsik Cho, Hogon Kim, Myoungryul Han, Hyunchul Kwun, Dongha Kim, Jangho Son
  • SEMICONDUCTOR PROCESSING SYSTEM INCLUDING TEMPERATURE CONTROLLER
    Publication number: 20220139736
    Abstract: A semiconductor processing system includes; a chamber, a substrate support disposed in the chamber, and a temperature controller including a thermal section disposed under the substrate support and a coupling section including at least one coupling section member. The thermal section includes a first plate and a second plate spaced apart under the substrate support, and each of the first plate and the second plate is coupled to a side portion of the substrate by at least one coupling section member.
    Type: Application
    Filed: March 24, 2021
    Publication date: May 5, 2022
    Inventors: KYOUNGSIK CHO, HOGON KIM, MYOUNGRYUL HAN, HYUNCHUL KWUN, DONGHA KIM, JANGHO SON