Patents by Inventor Myriam Van de Peer

Myriam Van de Peer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of fabrication of a microstructure having an internal cavity
    Publication number: 20020000649
    Abstract: The present invention relates to a method of fabricating a microstructure having an inside cavity comprising the steps of:
    Type: Application
    Filed: August 7, 2001
    Publication date: January 3, 2002
    Inventors: Hendrikus A.C. Tilmans, Eric Beyne, Myriam Van de Peer
  • Method of fabrication of a microstructure having an internal cavity
    Patent number: 6297072
    Abstract: A method of fabricating a microstructure having an inside cavity. The method includes depositing a first layer or a first stack of layers in a substantially closed geometric configuration on a first substrate. Then, performing an indent on the first layer or on the top layer of said first stack of layers. Then, depositing a second layer or a second stack of layers substantially with said substantially closed geometric configuration on a second substrate. Then, aligning and bonding said first substrate on said second substrate such that a microstructure having a cavity is formed according to said closed geometry configuration.
    Type: Grant
    Filed: April 16, 1999
    Date of Patent: October 2, 2001
    Assignee: Interuniversitair Micro-Elktronica Centrum (IMEC VZW)
    Inventors: Hendrikus A. C. Tilmans, Eric Beyne, Myriam Van de Peer