Abstract: Proposed are a process fluid treatment apparatus capable of decomposing ozone in a process fluid more effectively, and a wafer cleaning apparatus and semiconductor manufacturing equipment including the same. The process fluid treatment apparatus treats the process fluid used for cleaning a wafer in the semiconductor manufacturing equipment, and includes a housing having an inner space configured to contain the process fluid, a spray nozzle configured to spray the process fluid containing ozone into the inner space in the form of mist, and a nozzle heater configured to heat the process fluid passing through the spray nozzle.

Abstract: Proposed are a substrate processing apparatus having improved substrate drying performance by separately providing a chemical liquid supply nozzle and a gas supply nozzle; and a substrate processing method.

Abstract: An image-based livestock inventory management device includes a data transmission and reception module, a memory storing an image-based livestock inventory management program, and a processor configured to execute the image-based livestock inventory management program stored in the memory, wherein the image-based livestock inventory management program detects each livestock individual by inputting, to a livestock individual detection model, an image collected by at least one camera that captures a doorway of each livestock room which is set as one region of interest (ROI), tracks a movement state of each livestock individual by accumulating and storing center coordinates of detected each livestock individual, generates entry and exit state information of each livestock room by counting an entry action and an exit action of each livestock individual at the doorway of each livestock room for the ROI, and provides inventory information.

Abstract: A spray unit in which a plurality of nozzle heads are integrally coupled and a substrate treatment apparatus including the spray unit are provided. The substrate treatment apparatus includes: a substrate support unit supporting a substrate and including a spin head, which rotates the substrate; a treatment liquid retrieval unit retrieving substrate treatment liquids used in treating the substrate; and a spray unit including a plurality of nozzle heads and pipes, which are connected to the nozzle heads, and providing the substrate treatment liquids onto the substrate through the nozzle heads and the pipes, wherein the nozzle heads are moved at the same time.

Abstract: Provided are an ozone water decomposition apparatus and method that can decompose ozone water quickly and stably.

Abstract: Disclosed is a method of decomposing ozone in ozone water. According to the present invention, a temperature of ozone water is increased by mixing ozone water with heated water, and the ozone in the ozone water is decomposed into oxygen by the increase in the temperature.

Abstract: An animal object identification apparatus includes a memory storing a program for identifying an animal object based on the image, and a processor configured to identify the animal object based on the image by executing the program, wherein the processor detects specific body images of animal objects imaged in an input image as object regions to set the specific body images as input data, extracts flattened features for the input data by inputting the input data to a preset flattened-feature calculation model, generates clustering data by performing clustering for the flattened features and assigning identifiers for classifying the animal objects to at least one cluster, and assigns the identifiers to animal objects included in the object regions by comparing the flattened features calculated during extracting the flattened features with the clustering data.

Abstract: The inventive concept provides a substrate treating apparatus. In an embodiment, the substrate treating apparatus includes a housing having a treatment space for treating a substrate in an interior thereof, a support unit that supports the substrate in the treatment space, a nozzle that supplies a liquid to the substrate positioned on the support unit, a liquid supply unit that supplies the liquid to the nozzle, and a controller that controls the liquid unit, the liquid supply unit includes a tank having an interior space for storing the liquid, and a first circulation line that circulates the liquid stored in the interior space and in which a first heater is installed, and the controller controls the first heater such that the first heater heats the liquid to a first temperature, at which particles in the interior of the liquid are not eluted.

Abstract: An apparatus and a method for performing liquid treatment for a substrate are provided. The apparatus for treating the substrate includes a treating container having a treatment space inside the treating container, a substrate support unit to support a substrate in the treatment space, and a liquid supply unit to supply treatment liquid to the substrate supported by the substrate support unit. The liquid supply unit includes a nozzle, a supply line to supply the treatment liquid to the nozzle and having a first valve mounted in the supply line, and a discharge line branching from a branch point which is a point downstream of the first valve in the supply line to discharge the treatment liquid from the supply line, and having a second valve mounted in the discharge line. A valve is absent in an area between the branch point and the nozzle, in the supply line.

Abstract: An apparatus for detecting mounting behavior of an animal object includes: a memory that stores a program; and a processor that executes the program. The program extracts animal detection information about an animal object detected from the image by inputting the received image into an animal detection model. Also, the program extracts bounding boxes of which a distance between coordinates of central points is smaller than a first set value, bounding boxes of which a difference in rotational angle is smaller than a second set value, and bounding boxes of which a difference between a vector connecting the central points of the extracted bounding boxes and an orientation of each bounding box is smaller than a third set value. If activity information of the animal object is extracted based on an MHI of the image, it is determined that mounting behavior occurs.

Abstract: An image-based animal object condition identification apparatus includes: a communication module that receives an image of an object; a memory that stores therein a program configured to extract animal condition information from the received image; and a processor that executes the program. The program extracts continuous animal detection information of each object by inputting the received image into an animal detection model that is trained based on learning data composed of animal images and determines predetermined animal condition information for each class of each animal object by inputting the continuous animal detection information of each object into an animal condition identification model.

Abstract: Embodiments of the inventive concept described herein relate to an apparatus and method for removing an adhesive exposed to the outside from an object being processed. The apparatus for removing the adhesive exposed to the outside from an edge region of the object being processed, in which the object has a patterned substrate and a support plate bonded together by the adhesive, The cover liquid nozzle dispenses the cover liquid onto a cover area of a top surface of the object other than the exposed area, and the controller controls the cover liquid dispensing member to adjust a flow rate of the cover liquid to cause a removal rate of the adhesive to remain constant.

Abstract: An image-based animal object detection apparatus includes: a communication module; a memory that stores therein a program configured to extract animal detection information; and a processor that executes the program. Herein, the program configured to extract animal detection information extracts the animal detection information by inputting received image into an animal detection model that is trained based on learning data composed of animal images. The animal detection information includes, as information about a bounding box created to be suitable for an animal object detected from the image, coordinates of a central point, a width and a length of the bounding box and a rotational angle of the bounding box, and includes, a position information indicating keypoints of the animal object.

Abstract: A face recognition body temperature measuring apparatus includes a communication module receiving a video image and a thermal image obtained by simultaneously imaging at least one target object from a camera module, a memory storing a body temperature measurement program for measuring a body temperature by using the video image and the thermal image, and a processor executing the program.

Abstract: The inventive concept provides a substrate treating apparatus. In an embodiment, the substrate treating apparatus includes a housing having a treatment space for treating a substrate in an interior thereof, a support unit that supports the substrate in the treatment space, a nozzle that supplies a liquid to the substrate positioned on the support unit, a liquid supply unit that supplies the liquid to the nozzle, and a controller that controls the liquid unit, the liquid supply unit includes a tank having an interior space for storing the liquid, and a first circulation line that circulates the liquid stored in the interior space and in which a first heater is installed, and the controller controls the first heater such that the first heater heats the liquid to a first temperature, at which particles in the interior of the liquid are not eluted.

Abstract: An apparatus and a method for performing liquid treatment for a substrate are provided. The apparatus for treating the substrate includes a treating container having a treatment space inside the treating container, a substrate support unit to support a substrate in the treatment space, and a liquid supply unit to supply treatment liquid to the substrate supported by the substrate support unit. The liquid supply unit includes a nozzle, a supply line to supply the treatment liquid to the nozzle and having a first valve mounted in the supply line, and a discharge line branching from a branch point which is a point downstream of the first valve in the supply line to discharge the treatment liquid from the supply line, and having a second valve mounted in the discharge line. A valve is absent in an area between the branch point and the nozzle, in the supply line.

Abstract: A low frequency ultrasonic communication system includes: a low frequency ultrasonic transmitting apparatus configured to transmit data using a low frequency ultrasonic wave; and a low frequency ultrasonic receiving apparatus configured to recover the data by processing a low frequency ultrasonic reception signal transmitted from the low frequency ultrasonic transmitting apparatus. In communication between the transmitting apparatus and the receiving apparatus, modulation is performed using a DPSK scheme, and FEC coding is used to perform channel coding before the modulation.

Abstract: Embodiments of the inventive concept described herein relate to an apparatus and method for removing an adhesive exposed to the outside from an object being processed. The apparatus for removing the adhesive exposed to the outside from an edge region of the object being processed, in which the object has a patterned substrate and a support plate bonded together by the adhesive. The cover liquid nozzle dispenses the cover liquid onto a cover area of a top surface of the object other than the exposed area, and the controller controls the cover liquid dispensing member to adjust a flow rate of the cover liquid to cause a removal rate of the adhesive to remain constant.

Abstract: A method of detecting a particular abnormal sound in an environment with background noise is provided. The method includes acquiring a sound from a microphone, separating abnormal sounds from the input sound based on non-negative matrix factorization (NMF), extracting Mel-frequency cepstral coefficient (MFCC) parameters according to the separated abnormal sounds, calculating hidden Markov model (HMM) likelihoods according to the separated abnormal sounds, and comparing the likelihoods of the separated abnormal sounds with a reference value to determine whether or not an abnormal sound has occurred. According to the method, based on NMF, a sound to be detected is compared with ambient noise in a one-to-one basis and classified so that the sound may be stably detected even in an actual environment with multiple noises.

Abstract: A low frequency ultrasonic communication system includes: a low frequency ultrasonic transmitting apparatus configured to transmit data using a low frequency ultrasonic wave; and a low frequency ultrasonic receiving apparatus configured to recover the data by processing a low frequency ultrasonic reception signal transmitted from the low frequency ultrasonic transmitting apparatus. In communication between the transmitting apparatus and the receiving apparatus, modulation is performed using a DPSK scheme, and FEC coding is used to perform channel coding before the modulation.