Abstract: A substrate treatment apparatus including a chamber; a lower electrode in the chamber, wherein the substrate is on the lower electrode; an upper electrode in the chamber, and above the lower electrode; a pulse signal generator configured to generate a pulse signal; and a bias power supply configured to generate bias power having a pulsed non-sinusoidal waveform using the pulse signal, and supply the generated bias power to the lower electrode, wherein the bias power supply includes a DC power generator configured to receive the pulse signal and generate a direct-current (DC) voltage subjected to feedforward compensation based on the pulse signal; and a modulator configured to generate a power signal having a non-sinusoidal waveform using the DC voltage, and filter the power signal using the pulse signal to generate the bias power having the pulsed non-sinusoidal waveform.

Abstract: The present invention relates to a nickel-based catalyst for oxidizing carbon monoxide, which is prepared by forming nickel oxide on the surface of a mesoporous support by one or more cycles of atomic layer deposition, and a use thereof. The nickel-based catalyst for oxidizing carbon monoxide according to the present invention is stable at high temperatures because the size of the nickel oxide particles can be restricted to nanometer scales even at high-temperature conditions. In addition, the nickel-based catalyst exhibits catalytic reactivity for oxidation of carbon monoxide even at room temperatures. Additionally, the catalytic activity, which has been deactivated after conducting the catalytic reaction, can be regenerated through annealing and increased gradually through repeated annealing.

Abstract: The present invention relates to a nickel-based catalyst for oxidizing carbon monoxide, which is prepared by forming nickel oxide on the surface of a mesoporous support by one or more cycles of atomic layer deposition, and a use thereof. The nickel-based catalyst for oxidizing carbon monoxide according to the present invention is stable at high temperatures because the size of the nickel oxide particles can be restricted to nanometer scales even at high-temperature conditions. In addition, the nickel-based catalyst exhibits catalytic reactivity for oxidation of carbon monoxide even at room temperatures. Additionally, the catalytic activity, which has been deactivated after conducting the catalytic reaction, can be regenerated through annealing and increased gradually through repeated annealing.

Abstract: The present invention relates to a visible light-responsive photocatalyst with an excellent removal efficiency of environmental contaminants, and a method of preparing the same. According to the present invention, the TiO2 surface having an increased visible light absorbance due to nitrogen-doping has been modified into a hydrophilic surface using polydimethylsiloxane (PDMS), i.e., a silicon-carbon precursor, and thereby significantly improved the removal efficiency of environmental contaminants under visible light. Additionally, the photocatalyst of the present invention for removing environmental contaminants is applicable to environment-friendly fields such as removal of volatile organic compounds, air purification, wastewater treatment and sterilization, and enables to remove contaminants by being attached to the surfaces of external walls of buildings, construction materials, glass windows, sound-absorbing walls, road facilities, signboards, etc., while preventing damages by sunlight.