Abstract: Disclosure provides a two-segment electromagnet stirring member, and a two-segment electromagnet semi-solid die-casting apparatus including the same, and a die-casting method using the same. The two-segment electromagnet stirring member includes a plurality of magnetic field generation parts therein, and includes a first electromagnetic stirring part and a second electromagnetic stirring part separated from each other. The first electromagnetic stirring part and the second electromagnetic stirring part are coupled to each other in a ring shape to surround an outer circumferential surface of a sleeve to perform electromagnetic stirring to molten metal in the sleeve, and are coupled to each other so as to position the plurality of magnetic field generation parts at radially equal gaps around the sleeve.

Abstract: A substrate support unit of a substrate processing apparatus includes a first support member, a second support member, a buffer member and a tube. The first support member has an electrode and a heater built-in and supports the substrate. The second support member is disposed beneath the first support member to support the first support member. The buffer member is disposed between the first support member and the second support member to form an air gap between the first support member and the second support member so as to reduce heat transfer between the first support member and the second support member. The tube is connected with a lower surface of the first support member. Further, the tube extends through the second support member and receives lines for applying power to the electrode and the heater.