Abstract: An optical measurement apparatus includes a light source unit generating and outputting light, a polarized light generating unit generating polarized light from the light, an optical system generating a pupil image of a measurement target, using the polarized light, a self-interference generating unit generating multiple beams that are split from the pupil image, and a detecting unit detecting a self-interference image generated by interference of the multiple beams with each other.

Abstract: A optical measurement apparatus includes: an optical system which generates a pupil image of a measurement target, using light; a polarization generator which generates a polarized light from the light; a self-interference generator which generates a plurality of beams divided from the pupil image, using the polarized light, and causes the plurality of beams to interfere with each other to generate a self-interference image; and an image analysis unit configured to extract phase data from the self-interference image, and to move the measurement target to a focus position on the basis of the phase data.

Abstract: A method for fabricating a semiconductor device is provided. The method includes: loading a substrate on a stage of an apparatus for inspecting the substrate; extracting a first light having a first wavelength from a light by using a light source; acquiring first position information on at least one focal point, formed on the substrate, based on the first wavelength by using a controller, the at least one focal point being a pre-calculated at least one focal point; adjusting a position of at least one from among an objective lens and at least one microsphere in a vertical direction by using the first position information in the controller; condensing the first light, which has passed through the at least one microsphere, on the at least one focal point formed on the substrate; and inspecting the substrate by using the first light condensed on the at least one focal point.

Abstract: Provided is an optical measurement apparatus. The optical measurement apparatus includes a light source; an objective lens; a reflector configured to change an optical path of light emitted from the light source such that the light is directed toward the objective lens; a detector configured to detect a pupil image; a first adjuster configured to rotate the light source around the reflector; and a second adjuster configured to rotate the reflector.

Abstract: A photosensitive resin composition comprising (A) a cardo-based resin comprising a repeating unit represented by chemical formula 1 (comprising chemical formula 4); (B) a reactive unsaturated compound; (C) a pigment; (D) an initiator; and (E) a solvent, and a light blocking layer using the same having improved adhesiveness or adhesion are provided.

Abstract: A method for fabricating a semiconductor device is provided. The method for fabricating the semiconductor device includes forming a semiconductor pattern including a first layer and a second layer on a substrate, forming a coating layer on a surface of the first layer, forming a dyeing substance in which one of an antibody or a protein is combined with a fluorophore, attaching the dyeing substance to a surface of the coating layer to form a dyeing layer, and photographing the fluorophore with an ultra-high resolution microscope to detect the semiconductor pattern.

Abstract: A optical measurement apparatus includes: an optical system which generates a pupil image of a measurement target, using light; a polarization generator which generates a polarized light from the light; a self-interference generator which generates a plurality of beams divided from the pupil image, using the polarized light, and causes the plurality of beams to interfere with each other to generate a self-interference image; and an image analysis unit configured to extract phase data from the self-interference image, and to move the measurement target to a focus position on the basis of the phase data.

Abstract: A method for fabricating a semiconductor device is provided. The method includes: loading a substrate on a stage of an apparatus for inspecting the substrate; extracting a first light having a first wavelength from a light by using a light source; acquiring first position information on at least one focal point, formed on the substrate, based on the first wavelength by using a controller, the at least one focal point being a pre-calculated at least one focal point; adjusting a position of at least one from among an objective lens and at least one microsphere in a vertical direction by using the first position information in the controller; condensing the first light, which has passed through the at least one microsphere, on the at least one focal point formed on the substrate; and inspecting the substrate by using the first light condensed on the at least one focal point.

Abstract: An optical measurement apparatus includes a light source unit generating and outputting light, a polarized light generating unit generating polarized light from the light, an optical system generating a pupil image of a measurement target, using the polarized light, a self-interference generating unit generating multiple beams that are split from the pupil image, and a detecting unit detecting a self-interference image generated by interference of the multiple beams with each other.

Abstract: Systems and methods related to a structured illumination (SI)-based inspection apparatus are described. The SI-based inspection apparatus may be capable of accurately inspecting an inspection object in real time with high resolution, while reducing the loss of light. Also described are an inspection method, and a semiconductor device fabrication method including the SI-based inspection method. The inspection apparatus may include a light source configured to generate and output a light beam, a phase shifting grating (PSG) configured to convert the light beam from the light source into the SI, a beam splitter configured to cause the SI to be incident on an inspection object and output a reflected beam from the inspection object, a stage capable of moving the inspection object and on which the inspection object is arranged, and a time-delayed integration (TDI) camera configured to capture images of the inspection object by detecting the reflected beam.

Abstract: A fuel injection control system may include a variable exhaust valve mechanism configured to primarily open an exhaust valve directly before an intake stroke in which an intake valve is opened and to secondarily open the exhaust valve during the intake stroke such that valve overlap occurs; an exhaust injector provided at an exhaust side to inject fuel; and a controller for controlling the exhaust injector such that fuel is injected through the exhaust injector before the exhaust valve is opened secondarily before or during the intake stroke.

Abstract: A photosensitive resin composition comprising (A) a cardo-based resin comprising a repeating unit represented by chemical formula 1 (comprising chemical formula 4); (B) a reactive unsaturated compound; (C) a pigment; (D) an initiator; and (E) a solvent, and a light blocking layer using the same having improved adhesiveness or adhesion are provided

Abstract: A fuel injection control system may include a variable exhaust valve mechanism configured to primarily open an exhaust valve directly before an intake stroke in which an intake valve is opened and to secondarily open the exhaust valve during the intake stroke such that valve overlap occurs; an exhaust injector provided at an exhaust side to inject fuel; and a controller for controlling the exhaust injector such that fuel is injected through the exhaust injector before the exhaust valve is opened secondarily before or during the intake stroke.

Abstract: A method for controlling combustion in a diesel engine includes: premixing ambient air, EGR gas and vaporized diesel fuel in a combustion chamber during an intake stroke of each cylinder of the diesel engine; and sequentially performing, by an injector, pilot injection, main injection, and post injection during a compression stroke occurs after the intake stroke.

Abstract: Systems and methods related to a structured illumination (SI)-based inspection apparatus are described. The SI-based inspection apparatus may be capable of accurately inspecting an inspection object in real time with high resolution, while reducing the loss of light. Also described are an inspection method, and a semiconductor device fabrication method including the SI-based inspection method. The inspection apparatus may include a light source configured to generate and output a light beam, a phase shifting grating (PSG) configured to convert the light beam from the light source into the SI, a beam splitter configured to cause the SI to be incident on an inspection object and output a reflected beam from the inspection object, a stage capable of moving the inspection object and on which the inspection object is arranged, and a time-delayed integration (TDI) camera configured to capture images of the inspection object by detecting the reflected beam.

Abstract: A system and method for preventing a failure of an exhaust heat recovery device are provided. The method includes operating a sole exhaust heat recovery mode when cooling water has a temperature less than a warm-up reference temperature to introduce all exhaust gas flowing from a DPF into the exhaust heat recovery device where the exhaust gas exchanges heat with the cooling water. Additionally, a passage through which the exhaust gas bypasses the exhaust heat recovery device is opened when the exhaust gas at a rear of the DPF has a temperature greater than the warm-up reference temperature during the sole exhaust heat recovery mode.

Abstract: An exhaust heat recovery system may include a coolant circulation circuit arranged to connect an engine, an exhaust heat exchanger, a radiator, a water-cooled intercooler, and a sub-radiator, and controls each valve arranged on a passage which connects the engine, the exhaust heat exchanger, the radiator, the water-cooled intercooler, and the sub-radiator to the coolant circulation circuit according to the coolant temperature so as to control temperatures of coolant and intake air, thereby enabling the engine to be rapidly warmed up.

Abstract: A system and method for preventing a failure of an exhaust heat recovery device are provided. The method includes operating a sole exhaust heat recovery mode when cooling water has a temperature less than a warm-up reference temperature to introduce all exhaust gas flowing from a DPF into the exhaust heat recovery device where the exhaust gas exchanges heat with the cooling water. Additionally, a passage through which the exhaust gas bypasses the exhaust heat recovery device is opened when the exhaust gas at a rear of the DPF has a temperature greater than the warm-up reference temperature during the sole exhaust heat recovery mode.

Abstract: An apparatus for activating a catalyst of a hybrid vehicle may include: an engine including a plurality of cylinders, at least one intake valve and at least one exhaust valve, a variable valve apparatus adjusting lift and opening timing of the intake valve and exhaust valve, an integrated starter-generator, a driving information detector detecting driving information including a vehicle speed, a displacement of an accelerator pedal, and a displacement of a brake pedal, an exhaust gas purification apparatus, and a controller cutting off fuel supplied into the cylinder, opening the exhaust valve by using the variable valve apparatus during a suction stroke, and generating electrical energy through the integrated starter-generator when a regenerative braking condition of a hybrid vehicle is satisfied from the driving information detected by the driving information detector.

Abstract: An exhaust heat recovery system may include a coolant circulation circuit arranged to connect an engine, an exhaust heat exchanger, a radiator, a water-cooled intercooler, and a sub-radiator, and controls each valve arranged on a passage which connects the engine, the exhaust heat exchanger, the radiator, the water-cooled intercooler, and the sub-radiator to the coolant circulation circuit according to the coolant temperature so as to control temperatures of coolant and intake air, thereby enabling the engine to be rapidly warmed up.