Patents by Inventor Myung Kee HONG

Myung Kee HONG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230399747
    Abstract: Disclosed is a pedestal heater block for a chemical vapor deposition machine, in which a structure intended for causing a vacuum to be applied is installed on a surface so that a wafer can be fixed by vacuum absorption, and which comprises: gas supply holes distributed to supply gas for temperature uniformity onto a back side of the wafer; and a hot wire configured to apply heat to the wafer, wherein the hot wire is installed to have higher installation density in a central part of the heater block which is a position corresponding to a central part of the wafer than that in a neighborhood part which is an outer side of the heater block.
    Type: Application
    Filed: October 7, 2021
    Publication date: December 14, 2023
    Applicant: MECARO CO., LTD.
    Inventors: Jun Ho LEE, Dong Chul CHOI, Se Hyeok AHN, Myung Kee HONG, Jin Man PARK