Abstract: The present invention discloses an apparatus and method for treating perfluoro-compounds (PFCs). The method for treating PFCs includes: (a) decomposing PFCs and eliminating a first acid gas generated by the decomposition through a pre-cleaner; (b) filtering out dust particles from the exhaust gas through a filter; (c) electrifying the dust particles in the exhaust gas by electrical discharge and collecting dusts through a dust collector; (d) decomposing PFCs using a regenerative/catalytic reaction through a catalytic reactor; (e) eliminating a second acid gas generated by the regenerative/catalytic reaction through a post-cleaner; and (f) letting the purified exhaust gas out through a fan.