Abstract: A semiconductor manufacturing equipment may include a process chamber for treating a substrate; a front-end module including a first transfer robot, wherein the first transfer robot may be configured to transport the substrate received in a container; a transfer chamber between the front-end module and the process chamber, wherein the transfer chamber may be configured to load or unload the substrate into or out of the process chamber; and a cassette capable of receiving a replaceable component capable of being used in the process chamber. The front-end module may include a seat plate configured to move in a sliding manner so as to retract or extend into or from the front-end module. The cassette may be configured to be loaded into the front-end module while the cassette is seated on the seat plate.

Abstract: A battery protective circuit includes a battery controller, a charging control transistor, and a protection circuit. The battery controller controls charging of a battery according to a charging control voltage output through a charging control terminal. The a charging control transistor electrically connects the battery to a charger or to electrically disconnect the battery from the charger. The protection circuit includes a voltage sensing terminal electrically connected to a load, an input terminal electrically connected to the charging control terminal, and an output terminal electrically connected to a gate terminal of the charging control transistor. The protection circuit outputs a signal through the output terminal to turn off the charging control transistor, regardless of the charging control voltage of the input terminal, when a voltage equal to or greater than a threshold voltage is sensed at the voltage sensing terminal.

Abstract: A battery protection circuit includes a voltage source, a first resistor, a charging controller, a first charging transistor, a second resistor, and a current voltage converter. The first resistor includes a first terminal connected to the voltage source. The charging controller supplies a charging control current through a charging control terminal. The first charging transistor includes a gate terminal and a first terminal. The second resistor is connected between the gate terminal and first terminal of the first charging transistor. The current voltage converter is connected to a second terminal of the first resistor to electrically connect the voltage source to the gate terminal of the first charging transistor depending on the charging control current.

Abstract: A battery protective circuit includes a battery controller, a charging control transistor, and a protection circuit. The battery controller controls charging of a battery according to a charging control voltage output through a charging control terminal. The a charging control transistor electrically connects the battery to a charger or to electrically disconnect the battery from the charger. The protection circuit includes a voltage sensing terminal electrically connected to a load, an input terminal electrically connected to the charging control terminal, and an output terminal electrically connected to a gate terminal of the charging control transistor. The protection circuit outputs a signal through the output terminal to turn off the charging control transistor, regardless of the charging control voltage of the input terminal, when a voltage equal to or greater than a threshold voltage is sensed at the voltage sensing terminal.

Abstract: A battery protection circuit includes a voltage source, a first resistor, a charging controller, a charging transistor, a second resistor, and a current voltage converter. The first resistor includes a first terminal connected to the voltage source. The charging controller supplies charging control current through a charging control terminal. The first charging transistor includes a gate terminal and a first terminal. The second resistor is connected between the gate terminal and first terminal of the first charging transistor. The current voltage converter is connected to a second terminal of the first resistor to electrically connect the voltage source to the gate terminal of the first charging transistor depending on the charging control current.