Patents by Inventor Myung Seung SON

Myung Seung SON has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11494636
    Abstract: Provided is a machine learning-based semiconductor manufacturing yield prediction system and method. A result prediction method according to an embodiment of the present invention comprises: learning different neural network models by classifying different types of data according to their types and respectively inputting the classified different types of data to the different neural network models; and predicting result values by classifying input data according to their types and respectively inputting the classified input data to different neural network models. Therefore, it is possible to apply different neural network models to respective data according to their types, thereby ensuring a neural network model having a structure appropriate for the characteristics of each type of data and thus accurately predicting a result value.
    Type: Grant
    Filed: November 29, 2017
    Date of Patent: November 8, 2022
    Assignee: SK HOLDINGS CO., LTD.
    Inventors: Hang Duk Jung, Yong Sik Moon, Myung Seung Son, Min Hwan Lee, Jun Taek Park
  • Patent number: 11016467
    Abstract: A method and a system for sensing fine changes in processing/equipment measurement data are provided. A data change sensing method according to an embodiment of the present invention extracts a part on the basis of a statistical distribution of reference data and comparison data, calculates a target range on the basis of a specification, and discriminates data, included in the target range, among the extracted reference data and comparison data so as to determine data changes. Therefore, fine changes in measurement data for processing or equipment can be sensed in a manufacturing process, thereby enabling pre-estimation of potential quality variability of products and quick preemptive actions for preventing quality degradation.
    Type: Grant
    Filed: August 7, 2017
    Date of Patent: May 25, 2021
    Assignee: SK HOLDINGS CO., LTD.
    Inventors: Byung Min Lee, Tae Young Hong, Myung Seung Son
  • Publication number: 20190286983
    Abstract: Provided is a machine learning-based semiconductor manufacturing yield prediction system and method. A result prediction method according to an embodiment of the present invention comprises: learning different neural network models by classifying different types of data according to their types and respectively inputting the classified different types of data to the different neural network models; and predicting result values by classifying input data according to their types and respectively inputting the classified input data to different neural network models. Therefore, it is possible to apply different neural network models to respective data according to their types, thereby ensuring a neural network model having a structure appropriate for the characteristics of each type of data and thus accurately predicting a result value.
    Type: Application
    Filed: November 29, 2017
    Publication date: September 19, 2019
    Applicant: SK HOLDINGS CO., LTD.
    Inventors: Hang Duk JUNG, Yong Sik MOON, Myung Seung SON, Min Hwan LEE, Jun Taek PARK
  • Publication number: 20190196445
    Abstract: A method and a system for sensing fine changes in processing/equipment measurement data are provided. A data change sensing method according to an embodiment of the present invention extracts a part on the basis of a statistical distribution of reference data and comparison data, calculates a target range on the basis of a specification, and discriminates data, included in the target range, among the extracted reference data and comparison data so as to determine data changes. Therefore, fine changes in measurement data for processing or equipment can be sensed in a manufacturing process, thereby enabling pre-estimation of potential quality variability of products and quick preemptive actions for preventing quality degradation.
    Type: Application
    Filed: August 7, 2017
    Publication date: June 27, 2019
    Applicant: SK HOLDINGS CO., LTD.
    Inventors: Byung Min LEE, Tae Young HONG, Myung Seung SON