Patents by Inventor Myung-Suk Jo

Myung-Suk Jo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for measuring the metallurgical channel length of a semiconductor device
    Patent number: 5821766
    Abstract: A method and apparatus for measuring the metallurgical channel length of a semiconductor device includes the steps of determining capacitance of gate to substrate in a multiple MOS transistor pattern and MOS capacitor pattern which have the same gate area; subtracting the capacitance of gate to substrate in a MOS transistor from that in a MOS capacitor for providing a difference curve; determining the overlap length by using the capacitance corresponding to a peak shown in the differences curve; and subtracting two times the overlap length .DELTA.L from the gate length Ldrawn in the MOS transistor for providing the metallurgical channel length.
    Type: Grant
    Filed: February 20, 1996
    Date of Patent: October 13, 1998
    Assignee: Hyundai Electronics Industries Co., Ltd.
    Inventors: Sung-Ki Kim, Jin-Hyoung Kim, Dai-Hoon Lee, Han-Sub Yoon, Myung-Suk Jo