Abstract: Provided is a semiconductor device including a first stacked structure in which first conductive patterns and first interlayer insulating layers are alternately stacked, a second stacked structure formed on the first stacked structure and including second conductive patterns and second interlayer insulating layers, which are alternately stacked, an interfacial pattern formed between the first stacked structure and the second stacked structure, first through-areas passing through the first stacked structure and the interfacial pattern, and including first protrusions protruding toward a sidewall of the interfacial pattern, second through-areas passing through the second stacked structure and connected to the first through-areas, and through-structures formed along sidewalls of the first through-areas and the second through-areas.

Abstract: Provided is a semiconductor device including a first stacked structure in which first conductive patterns and first interlayer insulating layers are alternately stacked, a second stacked structure formed on the first stacked structure and including second conductive patterns and second interlayer insulating layers, which are alternately stacked, an interfacial pattern formed between the first stacked structure and the second stacked structure, first through-areas passing through the first stacked structure and the interfacial pattern, and including first protrusions protruding toward a sidewall of the interfacial pattern, second through-areas passing through the second stacked structure and connected to the first through-areas, and through-structures formed along sidewalls of the first through-areas and the second through-areas.