Patents by Inventor Myung-Sup Han

Myung-Sup Han has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • NOZZLE FOR HOLDING A SUBSTRATE AND APPARATUS FOR TRANSFERRING A SUBSTRATE INCLUDING THE SAME
    Publication number: 20110042983
    Abstract: A nozzle for holding a substrate may include a nozzle head and a nozzle body. The nozzle head may provide the substrate with compressed air. The nozzle body may be connected to the nozzle head. The nozzle body may be arranged facing the semiconductor substrate. The nozzle body may have a substantially flat supporting surface which provides a uniform gap between the substrate and the nozzle body. The nozzle body may have a first passageway which allows the compressed air to pass through toward the substrate to form a vacuum between the substantially flat supporting surface and the substrate.
    Type: Application
    Filed: July 12, 2010
    Publication date: February 24, 2011
    Inventors: Jun-Hee YI, Tea-Seog Um, Byung-Soo Kim, Ki-Taik Oh, Dong-Hyeon Kim, Dong-Goon Jung, Jin-Pyo Lee, Hyun Jung Kim, Myung-Sup Han