Abstract: The present invention relates to an implantable microfabricated sensor device and system for measuring a physiologic parameter of interest within a patient. The implantable device is micro electromechanical system (MEMS) device and includes a substrate having an integrated inductor and at least one sensor formed thereon. A plurality of conductive paths electrically connect the integrated inductor with the sensor. Cooperatively, the integrated inductor, sensor and conductive paths defining an LC tank resonator.

Abstract: A system and method for delivering a precise amount of fluid, such as a fluid for medical treatment. The system is a compact, fully-integrated, assembly that includes a sheet configured to be secured to a patient so that a surface of the sheet is held in contact with the patient's skin. The sheet carries a reservoir containing the fluid, a flow sensing device fluidically coupled to the reservoir, a device for initiating and interrupting flow of the fluid from the reservoir to the flow sensing device, a device for introducing the fluid into the patient's body, electronic circuitry for controlling fluid flow based on the output of the flow sensing device, and a power source.

Abstract: An anchor and procedure for placing a medical implant, such as for monitoring physiological parameters. The anchor includes a central body in which a medical implant can be received. arms and members extend radially from first and second ends, respectively, of the central body. Each member defines a leg extending toward distal portions of the arms to provide a clamping action. The anchor and its implant are placed by coupling first and second guidewires to first and second portions of the anchor, placing an end of a delivery catheter in a wall where implantation is desired, inserting the anchor in the catheter with the guidewires to locate the anchor within the wall, deploying the arms of the anchor at one side of the wall followed by deployment of the members at the opposite side of the wall, and thereafter decoupling the guidewires from the anchor.

Abstract: A fluid delivery system capable of delivering a precise amount of fluid, such as a fluid required for medical treatment. The delivery system makes use of an inline sensing unit that includes a housing comprising an inlet for receiving a fluid from a fluid source, an outlet for discharging the fluid from the housing, and at least one cavity between the inlet and the outlet. A sensing element and electronic circuitry are disposed within the at least one cavity. The electronic circuitry is adapted to produce an electrical output based on at least one response of the sensing element. The sensing unit is further equipped with a communication element for providing communication between the electronic circuitry and an electronic device remote from the housing.

Abstract: Micromachine fluidic apparatus incorporates a free-standing tube section and electrodes to actuate or control the movement of the tube section, or to sense the movement of the tube section, or both. Electronic circuitry, which may be disposed on the same substrate as the fluidic portion of the apparatus, is used in conjunction with the tube and electrodes in conjunction with a variety of different applications, including fluid flow measurement, fluid density measurement, fluid viscosity measurement, fluid transport, separation and/or mixing. According to a particular embodiment, the freestanding section of the tube is resonated for fluid flow and density measurements according to the Coriolis effect. Capacitive/electrostatic actuation techniques are used to control or resonate the free-standing section of the tube, and to detect variations in tube movement.

Abstract: Unwanted gasses created during bonding within micromachined vacuum cavities are reduced in a manner conducive to mass manufacturing. Two broad approaches may be applied separately or in combination according to the invention. One method is to deposit a barrier layer within the cavity (for example, on an exposed surface of the substrate). Such a layer not only provides a barrier against gases diffusing out of the substrate, but is also chosen so as to not outgas by itself. Another approach is to use a material which, instead of, or in addition to, acting as a barrier layer, acts as a getterer, such that it reacts with and traps unwanted gases. Incorporation of a getterer according to the invention can be as straightforward as depositing a thin metal layer on the substrate, which reacts to remove the impurities, or can be more elaborate through the use of a non-evaporable getter in a separate cavity in gaseous communication with the cavity.

Abstract: Micromachine fluidic apparatus incorporates a free-standing tube section and electrodes to actuate or control the movement of the tube section, or to sense the movement of the tube section, or both. Electronic circuitry, which may be disposed on the same substrate as the fluidic portion of the apparatus, is used in conjunction with the tube and electrodes in conjunction with a variety of different applications, including fluid flow measurement, fluid density measurement, fluid viscosity measurement, fluid transport, separation and/or mixing. According to a particular embodiment, the free-standing section of the tube is resonated for fluid flow and density measurements according to the Coriolis effect. Capacitive/electrostatic actuation techniques are used to control or resonate the free-standing section of the tube, and to detect variations in tube movement.

Abstract: The present invention relates to an implantable microfabricated sensor device and system for measuring a physiologic parameter of interest within a patient. The implantable device is micro electromechanical system (MEMS) device and includes a substrate having an integrated inductor and at least one sensor formed thereon. A plurality of conductive paths electrically connect the integrated inductor with the sensor. Cooperatively, the integrated inductor, sensor and conductive paths defining an LC tank resonator.

Abstract: The present invention defines an implantable microfabricated sensor device for measuring a physiologic parameter of interest within a patient. The sensor device includes a substrate and a sensor, integrally formed with the substrate, that is responsive to the physiologic parameter of interest. At least one conductive path is integrally formed with said substrate and coupled to the sensor. Connected to the conductive path is an active circuit. The active circuit is further electrically connected to the sensor.

Abstract: Structures and methods are disclosed in conjunction with the fabrication of electrical lead transfer feedthroughs with respect to a sealed cavity. In some applications such as capacitive pressure sensing, the cavity may include an outer wall, in which case the electrically insulating barrier is preferably U-shaped, with the ends of the U terminating at the outer wall. The feedthrough section may alternatively take the form of an island of conductive material surrounded by the electrically insulating barrier, thus assuming an O-shape. The cavity may be evacuated or filled with specific gases at specific pressures. As such, the invention finds application in the packaging (vacuum or controlled environment) and production of a variety of transducers including but not limited to pressure sensors, flow sensors, optical devices (e.g., infrared detectors, ccd camera, and flat-panel displays) and resonating devices, such as gyroscopes, accelerometers, yaw sensors, telecommunication devices, etc.

Abstract: A method for packaging and protection of sensors, particularly so called microsensors is disclosed. A sensor unit (either a sensor chip or sensor package) is flip chip bonded to a substrate having a through hole, such that the sensing element is placed above the through hole. An underfill material is applied in such a way that due to capillary forces, the entire common area between the sensor and the substrate is completely filled, while the sensing element is not covered by the underfill material. This provides an effective way of sealing the sensing element from the side of the package containing the electronics. For a sensor chip that has been through a first level packaging process, the above mentioned method can still be used for bonding the sensor package to a substrate containing an access hole. For some applications one or multiple layers of protective coatings can be deposited on either one side or both sides of the sensor package for protection against the operating environment.